JPS5678422A - Preparation of electrically conductive transparent thin film - Google Patents

Preparation of electrically conductive transparent thin film

Info

Publication number
JPS5678422A
JPS5678422A JP15260679A JP15260679A JPS5678422A JP S5678422 A JPS5678422 A JP S5678422A JP 15260679 A JP15260679 A JP 15260679A JP 15260679 A JP15260679 A JP 15260679A JP S5678422 A JPS5678422 A JP S5678422A
Authority
JP
Japan
Prior art keywords
base board
thin film
electrically conductive
transparent thin
conductive transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15260679A
Other languages
English (en)
Inventor
Yasuhiro Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoxan Corp
Hokusan Co Ltd
Original Assignee
Hoxan Corp
Hokusan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoxan Corp, Hokusan Co Ltd filed Critical Hoxan Corp
Priority to JP15260679A priority Critical patent/JPS5678422A/ja
Publication of JPS5678422A publication Critical patent/JPS5678422A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP15260679A 1979-11-26 1979-11-26 Preparation of electrically conductive transparent thin film Pending JPS5678422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15260679A JPS5678422A (en) 1979-11-26 1979-11-26 Preparation of electrically conductive transparent thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15260679A JPS5678422A (en) 1979-11-26 1979-11-26 Preparation of electrically conductive transparent thin film

Publications (1)

Publication Number Publication Date
JPS5678422A true JPS5678422A (en) 1981-06-27

Family

ID=15544068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15260679A Pending JPS5678422A (en) 1979-11-26 1979-11-26 Preparation of electrically conductive transparent thin film

Country Status (1)

Country Link
JP (1) JPS5678422A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136995A (ja) * 1984-12-03 1986-06-24 Shimadzu Corp 酸化物薄膜の製造法
JPH0219455A (ja) * 1988-07-05 1990-01-23 Mitsubishi Electric Corp 薄膜形成装置
JPH0499863A (ja) * 1990-08-13 1992-03-31 Sharp Corp Ｐｂを含む強誘電体複合酸化物の製造方法
US7092238B2 (en) 2002-12-06 2006-08-15 Matsushita Electric Industrial Co., Ltd. Metallized film capacitor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064796A (ja) * 1973-10-11 1975-06-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064796A (ja) * 1973-10-11 1975-06-02

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136995A (ja) * 1984-12-03 1986-06-24 Shimadzu Corp 酸化物薄膜の製造法
JPH0219455A (ja) * 1988-07-05 1990-01-23 Mitsubishi Electric Corp 薄膜形成装置
JPH0499863A (ja) * 1990-08-13 1992-03-31 Sharp Corp Ｐｂを含む強誘電体複合酸化物の製造方法
US7092238B2 (en) 2002-12-06 2006-08-15 Matsushita Electric Industrial Co., Ltd. Metallized film capacitor

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