JPS5678139A - Manufacture of semiconductor integrated circuit - Google Patents
Manufacture of semiconductor integrated circuitInfo
- Publication number
- JPS5678139A JPS5678139A JP15459379A JP15459379A JPS5678139A JP S5678139 A JPS5678139 A JP S5678139A JP 15459379 A JP15459379 A JP 15459379A JP 15459379 A JP15459379 A JP 15459379A JP S5678139 A JPS5678139 A JP S5678139A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- sio2
- thin film
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15459379A JPS5678139A (en) | 1979-11-29 | 1979-11-29 | Manufacture of semiconductor integrated circuit |
EP80304302A EP0030147B1 (en) | 1979-11-29 | 1980-11-28 | Method for manufacturing a semiconductor integrated circuit |
DE8080304302T DE3063191D1 (en) | 1979-11-29 | 1980-11-28 | Method for manufacturing a semiconductor integrated circuit |
US06/210,759 US4404737A (en) | 1979-11-29 | 1980-11-28 | Method for manufacturing a semiconductor integrated circuit utilizing polycrystalline silicon deposition, oxidation and etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15459379A JPS5678139A (en) | 1979-11-29 | 1979-11-29 | Manufacture of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5678139A true JPS5678139A (en) | 1981-06-26 |
Family
ID=15587573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15459379A Pending JPS5678139A (en) | 1979-11-29 | 1979-11-29 | Manufacture of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5678139A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5898956A (ja) * | 1981-12-09 | 1983-06-13 | Nec Corp | 半導体装置の製造方法 |
JPS59114861A (ja) * | 1982-12-21 | 1984-07-03 | Nec Corp | 半導体装置 |
-
1979
- 1979-11-29 JP JP15459379A patent/JPS5678139A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5898956A (ja) * | 1981-12-09 | 1983-06-13 | Nec Corp | 半導体装置の製造方法 |
JPS59114861A (ja) * | 1982-12-21 | 1984-07-03 | Nec Corp | 半導体装置 |
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