JPS5673428A - Method of forming film - Google Patents

Method of forming film

Info

Publication number
JPS5673428A
JPS5673428A JP15085579A JP15085579A JPS5673428A JP S5673428 A JPS5673428 A JP S5673428A JP 15085579 A JP15085579 A JP 15085579A JP 15085579 A JP15085579 A JP 15085579A JP S5673428 A JPS5673428 A JP S5673428A
Authority
JP
Japan
Prior art keywords
gas
magnetic field
distribution
field strength
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15085579A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127569B2 (enExample
Inventor
Nobuo Kitajima
Yoshiki Hazemoto
Shigeru Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15085579A priority Critical patent/JPS5673428A/ja
Publication of JPS5673428A publication Critical patent/JPS5673428A/ja
Publication of JPH0127569B2 publication Critical patent/JPH0127569B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H10P14/24—
    • H10P14/3411—
    • H10P14/3442—
    • H10P14/3444—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
JP15085579A 1979-11-21 1979-11-21 Method of forming film Granted JPS5673428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15085579A JPS5673428A (en) 1979-11-21 1979-11-21 Method of forming film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15085579A JPS5673428A (en) 1979-11-21 1979-11-21 Method of forming film

Publications (2)

Publication Number Publication Date
JPS5673428A true JPS5673428A (en) 1981-06-18
JPH0127569B2 JPH0127569B2 (enExample) 1989-05-30

Family

ID=15505837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15085579A Granted JPS5673428A (en) 1979-11-21 1979-11-21 Method of forming film

Country Status (1)

Country Link
JP (1) JPS5673428A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970333U (ja) * 1982-10-29 1984-05-12 株式会社日立国際電気 プラズマ化学気相生成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046074A (enExample) * 1973-08-28 1975-04-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046074A (enExample) * 1973-08-28 1975-04-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970333U (ja) * 1982-10-29 1984-05-12 株式会社日立国際電気 プラズマ化学気相生成装置

Also Published As

Publication number Publication date
JPH0127569B2 (enExample) 1989-05-30

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