JPS64271A - Microwave plasma cvd device - Google Patents
Microwave plasma cvd deviceInfo
- Publication number
- JPS64271A JPS64271A JP62153503A JP15350387A JPS64271A JP S64271 A JPS64271 A JP S64271A JP 62153503 A JP62153503 A JP 62153503A JP 15350387 A JP15350387 A JP 15350387A JP S64271 A JPS64271 A JP S64271A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- carrier
- film
- magnetic field
- produce
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/05—Organic bonding materials; Methods for coating a substrate with a photoconductive layer; Inert supplements for use in photoconductive layers
- G03G5/0525—Coating methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To steadily obtain a high quality deposited film even with a large-area or long-sized carrier and to mass-produce the film by arranging the carrier so that the film forming carrier is paralleled with the plasma drawing direction, and forming a magnetic field in the same direction as above. CONSTITUTION:A stimulating gas is stimulated in an electron cyclotron resonance (ECR) cavity 101 to produce plasma, the plasma is introduced into a film forming chamber 107 from a drawing window 106, and a gaseous material is introduced into the plasma to produce gaseous material plasma. Carriers 110 with a rotating shaft 113 are annularly arranged so that the carrier 110 in the chamber 107 is paralleled with the drawing direction of the plasma drawn out from an ECR ion source. In addition, a magnet 111 is provided at the center part of each carrier 110 to form a magnetic field in the same direction as the plasma drawing direction in the rotating shaft 133, the produced plasma current 124 is transported for a long distance along the magnetic field without lowering the plasma density, and a film is simultaneously formed on the surface of the carrier 110.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-153503A JPH01271A (en) | 1987-06-22 | Microwave plasma CVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-153503A JPH01271A (en) | 1987-06-22 | Microwave plasma CVD equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS64271A true JPS64271A (en) | 1989-01-05 |
| JPH01271A JPH01271A (en) | 1989-01-05 |
Family
ID=
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994023088A1 (en) * | 1993-03-30 | 1994-10-13 | Robert Bosch Gmbh | Device for producing a plasma polymer protection layer on workpieces, in particular headlamp reflectors |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994023088A1 (en) * | 1993-03-30 | 1994-10-13 | Robert Bosch Gmbh | Device for producing a plasma polymer protection layer on workpieces, in particular headlamp reflectors |
| US5520741A (en) * | 1993-03-30 | 1996-05-28 | Robert Bosch Gmbh | Apparatus for producing a plasma polymer protective layer on workpieces, in particular headlamp reflectors |
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