JPS64270A - Microwave plasma cvd device - Google Patents

Microwave plasma cvd device

Info

Publication number
JPS64270A
JPS64270A JP62153502A JP15350287A JPS64270A JP S64270 A JPS64270 A JP S64270A JP 62153502 A JP62153502 A JP 62153502A JP 15350287 A JP15350287 A JP 15350287A JP S64270 A JPS64270 A JP S64270A
Authority
JP
Japan
Prior art keywords
carrier
vessel
magnetic field
deposited film
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62153502A
Other languages
Japanese (ja)
Other versions
JP2609866B2 (en
JPH01270A (en
Inventor
Satoru Sugita
Shotaro Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62153502A priority Critical patent/JP2609866B2/en
Publication of JPS64270A publication Critical patent/JPS64270A/en
Publication of JPH01270A publication Critical patent/JPH01270A/en
Application granted granted Critical
Publication of JP2609866B2 publication Critical patent/JP2609866B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To steadily mass-produce a high quality deposited film over a large area by arranging a magnet on the outer periphery of a microwave inlet part and the opposed position to form a closed magnetic field. CONSTITUTION:A deposited film forming carrier 9 in a vacuum vessel 7 is rotated by a motor 16, a raw gas is introduced into the vessel 7 to keep the vessel 7 at a specified pressure, a microwave is introduced from both ends of the vessel 7 through an inlet window 3, and glow discharge plasma is produced in the discharge space A surrounded by the plural carriers 9. Since a closed magnetic field is formed between the windows 3 by both magnets 6 arranged on the outer peripheries of the respective windows 3, the plasma density is increased at the central part 20 of the space A, namely in the space impressed with the magnetic field. As a result, the plasma density is lowered on the surface of the carrier 9 or the plasma is separated from the surface of the carrier 9, hence the overheating of the surface of the carrier 9 is prevented, and a film is always formed under stabilized temp. conditions. Accordingly, a uniform and high quality deposited film can be stably formed with good reproducibility.
JP62153502A 1987-06-22 1987-06-22 Microwave plasma CVD equipment Expired - Fee Related JP2609866B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62153502A JP2609866B2 (en) 1987-06-22 1987-06-22 Microwave plasma CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62153502A JP2609866B2 (en) 1987-06-22 1987-06-22 Microwave plasma CVD equipment

Publications (3)

Publication Number Publication Date
JPS64270A true JPS64270A (en) 1989-01-05
JPH01270A JPH01270A (en) 1989-01-05
JP2609866B2 JP2609866B2 (en) 1997-05-14

Family

ID=15563961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62153502A Expired - Fee Related JP2609866B2 (en) 1987-06-22 1987-06-22 Microwave plasma CVD equipment

Country Status (1)

Country Link
JP (1) JP2609866B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5514217A (en) * 1990-11-16 1996-05-07 Canon Kabushiki Kaisha Microwave plasma CVD apparatus with a deposition chamber having a circumferential wall comprising a curved moving substrate web and a microwave applicator means having a specific dielectric member on the exterior thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230880A (en) * 1985-08-01 1987-02-09 Canon Inc Deposited film forming device by plasma cvd method
JPS6260876A (en) * 1985-09-09 1987-03-17 Ricoh Co Ltd Device for vapor-depositing thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230880A (en) * 1985-08-01 1987-02-09 Canon Inc Deposited film forming device by plasma cvd method
JPS6260876A (en) * 1985-09-09 1987-03-17 Ricoh Co Ltd Device for vapor-depositing thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5514217A (en) * 1990-11-16 1996-05-07 Canon Kabushiki Kaisha Microwave plasma CVD apparatus with a deposition chamber having a circumferential wall comprising a curved moving substrate web and a microwave applicator means having a specific dielectric member on the exterior thereof

Also Published As

Publication number Publication date
JP2609866B2 (en) 1997-05-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees