JPS567339A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS567339A
JPS567339A JP8245879A JP8245879A JPS567339A JP S567339 A JPS567339 A JP S567339A JP 8245879 A JP8245879 A JP 8245879A JP 8245879 A JP8245879 A JP 8245879A JP S567339 A JPS567339 A JP S567339A
Authority
JP
Japan
Prior art keywords
support member
setscrews
filament
drift
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8245879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216501B2 (enrdf_load_stackoverflow
Inventor
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8245879A priority Critical patent/JPS567339A/ja
Publication of JPS567339A publication Critical patent/JPS567339A/ja
Publication of JPS6216501B2 publication Critical patent/JPS6216501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8245879A 1979-06-29 1979-06-29 Electron gun Granted JPS567339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8245879A JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8245879A JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Publications (2)

Publication Number Publication Date
JPS567339A true JPS567339A (en) 1981-01-26
JPS6216501B2 JPS6216501B2 (enrdf_load_stackoverflow) 1987-04-13

Family

ID=13775061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8245879A Granted JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Country Status (1)

Country Link
JP (1) JPS567339A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016027575A1 (ja) * 2014-08-20 2016-02-25 株式会社島津製作所 電子源およびそれを備えたｘ線管

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137660A (en) * 1977-05-09 1978-12-01 Hitachi Ltd Electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137660A (en) * 1977-05-09 1978-12-01 Hitachi Ltd Electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016027575A1 (ja) * 2014-08-20 2016-02-25 株式会社島津製作所 電子源およびそれを備えたｘ線管
JPWO2016027575A1 (ja) * 2014-08-20 2017-05-25 株式会社島津製作所 電子源およびそれを備えたｘ線管

Also Published As

Publication number Publication date
JPS6216501B2 (enrdf_load_stackoverflow) 1987-04-13

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