JPS5669849A - Semiconductor pressure converting device - Google Patents

Semiconductor pressure converting device

Info

Publication number
JPS5669849A
JPS5669849A JP14826479A JP14826479A JPS5669849A JP S5669849 A JPS5669849 A JP S5669849A JP 14826479 A JP14826479 A JP 14826479A JP 14826479 A JP14826479 A JP 14826479A JP S5669849 A JPS5669849 A JP S5669849A
Authority
JP
Japan
Prior art keywords
cavity
converting device
back surface
diaphragm
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14826479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154273B2 (enrdf_load_stackoverflow
Inventor
Toru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14826479A priority Critical patent/JPS5669849A/ja
Publication of JPS5669849A publication Critical patent/JPS5669849A/ja
Publication of JPS6154273B2 publication Critical patent/JPS6154273B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP14826479A 1979-11-12 1979-11-12 Semiconductor pressure converting device Granted JPS5669849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14826479A JPS5669849A (en) 1979-11-12 1979-11-12 Semiconductor pressure converting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14826479A JPS5669849A (en) 1979-11-12 1979-11-12 Semiconductor pressure converting device

Publications (2)

Publication Number Publication Date
JPS5669849A true JPS5669849A (en) 1981-06-11
JPS6154273B2 JPS6154273B2 (enrdf_load_stackoverflow) 1986-11-21

Family

ID=15448874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14826479A Granted JPS5669849A (en) 1979-11-12 1979-11-12 Semiconductor pressure converting device

Country Status (1)

Country Link
JP (1) JPS5669849A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642131U (enrdf_load_stackoverflow) * 1987-06-25 1989-01-09
JP2006329883A (ja) * 2005-05-27 2006-12-07 Hitachi Ltd 気体圧力検知装置
JP2006528365A (ja) * 2003-05-16 2006-12-14 ローズマウント インコーポレイテッド 圧力センサカプセル
JP2008059958A (ja) * 2006-09-01 2008-03-13 Nitto Electric Works Ltd 配線用遮断器
JP2012247391A (ja) * 2011-05-31 2012-12-13 Denso Corp 圧力センサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642131U (enrdf_load_stackoverflow) * 1987-06-25 1989-01-09
JP2006528365A (ja) * 2003-05-16 2006-12-14 ローズマウント インコーポレイテッド 圧力センサカプセル
JP2006329883A (ja) * 2005-05-27 2006-12-07 Hitachi Ltd 気体圧力検知装置
JP2008059958A (ja) * 2006-09-01 2008-03-13 Nitto Electric Works Ltd 配線用遮断器
JP2012247391A (ja) * 2011-05-31 2012-12-13 Denso Corp 圧力センサ

Also Published As

Publication number Publication date
JPS6154273B2 (enrdf_load_stackoverflow) 1986-11-21

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