JPS5669815A - Manufacture of oxide magnetic thin film - Google Patents

Manufacture of oxide magnetic thin film

Info

Publication number
JPS5669815A
JPS5669815A JP14666279A JP14666279A JPS5669815A JP S5669815 A JPS5669815 A JP S5669815A JP 14666279 A JP14666279 A JP 14666279A JP 14666279 A JP14666279 A JP 14666279A JP S5669815 A JPS5669815 A JP S5669815A
Authority
JP
Japan
Prior art keywords
spattering
target
thin film
preliminary
fe3o4
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14666279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246970B2 (enrdf_load_stackoverflow
Inventor
Masamichi Tagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14666279A priority Critical patent/JPS5669815A/ja
Publication of JPS5669815A publication Critical patent/JPS5669815A/ja
Publication of JPS6246970B2 publication Critical patent/JPS6246970B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
JP14666279A 1979-11-13 1979-11-13 Manufacture of oxide magnetic thin film Granted JPS5669815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14666279A JPS5669815A (en) 1979-11-13 1979-11-13 Manufacture of oxide magnetic thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14666279A JPS5669815A (en) 1979-11-13 1979-11-13 Manufacture of oxide magnetic thin film

Publications (2)

Publication Number Publication Date
JPS5669815A true JPS5669815A (en) 1981-06-11
JPS6246970B2 JPS6246970B2 (enrdf_load_stackoverflow) 1987-10-06

Family

ID=15412778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14666279A Granted JPS5669815A (en) 1979-11-13 1979-11-13 Manufacture of oxide magnetic thin film

Country Status (1)

Country Link
JP (1) JPS5669815A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6246970B2 (enrdf_load_stackoverflow) 1987-10-06

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