JPS5667936A - Preparation method of semiconductor integrated circuit - Google Patents
Preparation method of semiconductor integrated circuitInfo
- Publication number
- JPS5667936A JPS5667936A JP14356479A JP14356479A JPS5667936A JP S5667936 A JPS5667936 A JP S5667936A JP 14356479 A JP14356479 A JP 14356479A JP 14356479 A JP14356479 A JP 14356479A JP S5667936 A JPS5667936 A JP S5667936A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- integrated circuit
- semiconductor integrated
- elements
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14356479A JPS5667936A (en) | 1979-11-06 | 1979-11-06 | Preparation method of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14356479A JPS5667936A (en) | 1979-11-06 | 1979-11-06 | Preparation method of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5667936A true JPS5667936A (en) | 1981-06-08 |
Family
ID=15341673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14356479A Pending JPS5667936A (en) | 1979-11-06 | 1979-11-06 | Preparation method of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5667936A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132143A (en) * | 1981-05-06 | 1982-08-16 | Tokai Rika Co Ltd | Method for fixing light-irradiated image deposited on glass surface |
-
1979
- 1979-11-06 JP JP14356479A patent/JPS5667936A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132143A (en) * | 1981-05-06 | 1982-08-16 | Tokai Rika Co Ltd | Method for fixing light-irradiated image deposited on glass surface |
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