JPS5664648A - Precision inspection system of cut face fault - Google Patents

Precision inspection system of cut face fault

Info

Publication number
JPS5664648A
JPS5664648A JP14044579A JP14044579A JPS5664648A JP S5664648 A JPS5664648 A JP S5664648A JP 14044579 A JP14044579 A JP 14044579A JP 14044579 A JP14044579 A JP 14044579A JP S5664648 A JPS5664648 A JP S5664648A
Authority
JP
Japan
Prior art keywords
photoelectric detector
cut face
light
light source
convex lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14044579A
Other languages
Japanese (ja)
Inventor
Takeshi Yamaguchi
Masanori Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP14044579A priority Critical patent/JPS5664648A/en
Publication of JPS5664648A publication Critical patent/JPS5664648A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To obtain a system which can at one time measure a comparatively wide range of cut face area by a method wherein a precision cut face is structured by an illumination light source, a photoelectric detector, and an image forming optical system which forms images in a photoelectric detector. CONSTITUTION:An illumination light from a light source 2 is made into a parallel flux of light 4 through a convex lens 3 and is transmitted through a half mirror 5 to illuminate a sample 1 and then, the light reflected at the half mirror 5 is lead to a photoelectric detector 7 via an image forming lens 16. And the movement of the light source 2 and the convex lens 3 is stopped at the point where the variation of photoelectric output of the photoelectric detector 7 in accordance with the movement of the light source 2 and the convex lens 3 reaches the peak value, and the illuminated area of the cut face 1a is made to form images in the photoelectric detector 7. This image is scanned by means of the photoelectric detector 7 and light strength is measured, and further, by indicating the measured light strength, fault of the cut face 1a is observed.
JP14044579A 1979-11-01 1979-11-01 Precision inspection system of cut face fault Pending JPS5664648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14044579A JPS5664648A (en) 1979-11-01 1979-11-01 Precision inspection system of cut face fault

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14044579A JPS5664648A (en) 1979-11-01 1979-11-01 Precision inspection system of cut face fault

Publications (1)

Publication Number Publication Date
JPS5664648A true JPS5664648A (en) 1981-06-01

Family

ID=15268791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14044579A Pending JPS5664648A (en) 1979-11-01 1979-11-01 Precision inspection system of cut face fault

Country Status (1)

Country Link
JP (1) JPS5664648A (en)

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