JPS56644A - Abrasion detector - Google Patents

Abrasion detector

Info

Publication number
JPS56644A
JPS56644A JP7534079A JP7534079A JPS56644A JP S56644 A JPS56644 A JP S56644A JP 7534079 A JP7534079 A JP 7534079A JP 7534079 A JP7534079 A JP 7534079A JP S56644 A JPS56644 A JP S56644A
Authority
JP
Japan
Prior art keywords
light
inspected material
abrasion
photodetector
projected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7534079A
Other languages
Japanese (ja)
Inventor
Kenji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP7534079A priority Critical patent/JPS56644A/en
Publication of JPS56644A publication Critical patent/JPS56644A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To make it possible to detect a minute abrasion, by not only projecting a light beam at a specific angle to an inspected material but also receiving the reflection light of the inspected material normal direction by a photodetector. CONSTITUTION:The laser light beam emitted from laser light source 11 is projected to rotary polyhedral mirror 13 for scanning after the size of the light flux is made into a fixed size, and the reflection light is projected to inspected material 15 as fixed angle theta (0 deg.<theta<90 deg.) in the width direction through lens 14 for parallel scanning. Black hood 17 is provided on the inspected material of the light path, and photodetector 16 is arranged which has directivity to receive only the light of the normal direction. As a result, since only the reflection light dependent upon an abrasion can be separated and received, even a very minute abrasion can be detected with a high sensitivity.
JP7534079A 1979-06-15 1979-06-15 Abrasion detector Pending JPS56644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7534079A JPS56644A (en) 1979-06-15 1979-06-15 Abrasion detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7534079A JPS56644A (en) 1979-06-15 1979-06-15 Abrasion detector

Publications (1)

Publication Number Publication Date
JPS56644A true JPS56644A (en) 1981-01-07

Family

ID=13573420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7534079A Pending JPS56644A (en) 1979-06-15 1979-06-15 Abrasion detector

Country Status (1)

Country Link
JP (1) JPS56644A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135207U (en) * 1988-03-08 1989-09-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135207U (en) * 1988-03-08 1989-09-14

Similar Documents

Publication Publication Date Title
JPS5722506A (en) Optical noncontact type detector
ATE14246T1 (en) OPTICAL-MECHANICAL SCANNING MECHANISM.
JPS57186169A (en) Detector for particle coagulation pattern
US3062965A (en) Photoelectric scanning device
JPS54128682A (en) Automatic detector for foreign matters
JPS56644A (en) Abrasion detector
JPS5483853A (en) Measuring device
JPS5228335A (en) Optical unit
JPS5767815A (en) Measuring method for position of reflector using light
WO1995002179B1 (en) Misalignment detection apparatus for transmissometer with underfilled reflector
JPS57135343A (en) Surface defect inspecting device
JPS55117946A (en) Flaw detection method of hollow shaft inside surface
JPS649306A (en) Detector for light transmitting fine pattern
JPS54136888A (en) Surface defect detecting device
JPS5669606A (en) Focus detector
JPS5636139A (en) Detecting method for substrate of semiconductor device
JPS53107865A (en) Detector of minute undulations
JPS6484119A (en) Object state detector
JPS57210308A (en) Focus detecting device
JPS556239A (en) Rotation detector for tachometer
JPS5648050A (en) Reflected electron detector
JPS5540942A (en) Range finder
JPS54103378A (en) Densitometer
JPS55124008A (en) Defect inspecting apparatus
JPS5483885A (en) Surface inspector