JPS56593A - Rotor of turbomolecule pump and its manufacture - Google Patents

Rotor of turbomolecule pump and its manufacture

Info

Publication number
JPS56593A
JPS56593A JP7725380A JP7725380A JPS56593A JP S56593 A JPS56593 A JP S56593A JP 7725380 A JP7725380 A JP 7725380A JP 7725380 A JP7725380 A JP 7725380A JP S56593 A JPS56593 A JP S56593A
Authority
JP
Japan
Prior art keywords
turbomolecule
rotor
pump
manufacture
turbomolecule pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7725380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS649475B2 (cs
Inventor
Shiyutsutsu Giyuntaa
Utsuseruman Edogaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of JPS56593A publication Critical patent/JPS56593A/ja
Publication of JPS649475B2 publication Critical patent/JPS649475B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/02—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from one piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP7725380A 1979-06-11 1980-06-10 Rotor of turbomolecule pump and its manufacture Granted JPS56593A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792923632 DE2923632A1 (de) 1979-06-11 1979-06-11 Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor

Publications (2)

Publication Number Publication Date
JPS56593A true JPS56593A (en) 1981-01-07
JPS649475B2 JPS649475B2 (cs) 1989-02-17

Family

ID=6072988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7725380A Granted JPS56593A (en) 1979-06-11 1980-06-10 Rotor of turbomolecule pump and its manufacture

Country Status (5)

Country Link
JP (1) JPS56593A (cs)
CH (1) CH646229A5 (cs)
DE (1) DE2923632A1 (cs)
FR (1) FR2458351B1 (cs)
GB (1) GB2052317B (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (ja) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 間仕切り
JPS6136479A (ja) * 1983-11-30 1986-02-21 八木　清行 折戸式自動扉の駆動装置
JPS61210293A (ja) * 1985-03-01 1986-09-18 バルツェルスープファイファー・ゲーエムベーハー 翼羽を有する円板およびその製造方法および装置
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
US6474940B1 (en) 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
JP2016075276A (ja) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
IT1293907B1 (it) * 1997-05-28 1999-03-11 Varian Spa Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
EP1249612B1 (en) 2001-03-15 2004-01-28 VARIAN S.p.A. Method of manufacturing a stator stage for a turbine pump
US20100199495A1 (en) * 2006-04-29 2010-08-12 Oerlikon Leybold Vacuum Gmbh Process for preparing rotors or stators of a turbomolecular pump
DE102009015652A1 (de) * 2009-03-31 2010-10-07 Light Style Gmbh Verfahren zur Herstellung eines Gebrauchsproduktes aus Aluminium und danach hergestelltes Produkt
DE102011117920B4 (de) * 2011-11-09 2013-08-01 Voith Patent Gmbh Verfahren zum Herstellen eines Schaufelrades, sowie danach hergestelltes Schaufelrad
EP3091235B1 (de) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotorscheibe
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227367Y1 (cs) * 1975-09-30 1977-06-22

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH159747A (fr) * 1930-01-11 1933-01-31 Westinghouse Electric Corp Hélice et procédé pour sa fabrication.
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2627309A1 (de) * 1976-06-18 1977-12-22 Daimler Benz Ag Verfahren und vorrichtung zur herstellung eines keramischen turbinenrades
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227367Y1 (cs) * 1975-09-30 1977-06-22

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (ja) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 間仕切り
JPS6136479A (ja) * 1983-11-30 1986-02-21 八木　清行 折戸式自動扉の駆動装置
JPS61210293A (ja) * 1985-03-01 1986-09-18 バルツェルスープファイファー・ゲーエムベーハー 翼羽を有する円板およびその製造方法および装置
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
US6474940B1 (en) 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
JP2016075276A (ja) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク

Also Published As

Publication number Publication date
FR2458351A1 (fr) 1981-01-02
CH646229A5 (de) 1984-11-15
GB2052317B (en) 1982-12-01
DE2923632A1 (de) 1980-12-18
FR2458351B1 (fr) 1985-07-12
GB2052317A (en) 1981-01-28
JPS649475B2 (cs) 1989-02-17

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