GB2052317B - Rotors for turbo-molecular pumps - Google Patents

Rotors for turbo-molecular pumps

Info

Publication number
GB2052317B
GB2052317B GB8013318A GB8013318A GB2052317B GB 2052317 B GB2052317 B GB 2052317B GB 8013318 A GB8013318 A GB 8013318A GB 8013318 A GB8013318 A GB 8013318A GB 2052317 B GB2052317 B GB 2052317B
Authority
GB
United Kingdom
Prior art keywords
rotors
turbo
molecular pumps
pumps
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8013318A
Other versions
GB2052317A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB2052317A publication Critical patent/GB2052317A/en
Application granted granted Critical
Publication of GB2052317B publication Critical patent/GB2052317B/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/02—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from one piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
GB8013318A 1979-06-11 1980-04-23 Rotors for turbo-molecular pumps Expired GB2052317B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792923632 DE2923632A1 (en) 1979-06-11 1979-06-11 METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE

Publications (2)

Publication Number Publication Date
GB2052317A GB2052317A (en) 1981-01-28
GB2052317B true GB2052317B (en) 1982-12-01

Family

ID=6072988

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8013318A Expired GB2052317B (en) 1979-06-11 1980-04-23 Rotors for turbo-molecular pumps

Country Status (5)

Country Link
JP (1) JPS56593A (en)
CH (1) CH646229A5 (en)
DE (1) DE2923632A1 (en)
FR (1) FR2458351B1 (en)
GB (1) GB2052317B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (en) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 partition
JPS6136479A (en) * 1983-11-30 1986-02-21 八木　清行 Drive apparatus of foldable type automatic door
DE3507274A1 (en) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
IT1293907B1 (en) * 1997-05-28 1999-03-11 Varian Spa MILLING PROCEDURE OF TURBOMOLECULAR PUMPS ROTORS WITH RESIN EMBOSSING OF THE PARTS TO BE MILLED.
JP3092063B2 (en) * 1998-06-17 2000-09-25 セイコー精機株式会社 Turbo molecular pump
DE10053664A1 (en) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanical kinetic vacuum pump
EP1249612B1 (en) 2001-03-15 2004-01-28 VARIAN S.p.A. Method of manufacturing a stator stage for a turbine pump
RU2435076C2 (en) * 2006-04-29 2011-11-27 Ёрликон Лайбольд Вакуум Гмбх Manufacturing method of rotors and stators of turbomolecular pump
DE102009015652A1 (en) * 2009-03-31 2010-10-07 Light Style Gmbh Method for manufacturing usage product made of aluminum, method involves manufacturing usage product by material-machining, particularly removing processing
DE102011117920B4 (en) * 2011-11-09 2013-08-01 Voith Patent Gmbh Method for producing a paddle wheel, and paddle wheel produced thereafter
DE102014114326A1 (en) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Method for producing a rotor or stator disk for a vacuum pump and rotor or stator disk for a vacuum pump
EP3091235B1 (en) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotor disc
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH159747A (en) * 1930-01-11 1933-01-31 Westinghouse Electric Corp Propeller and process for its manufacture.
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
BE757354A (en) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
JPS5227367Y1 (en) * 1975-09-30 1977-06-22
DE2627309A1 (en) * 1976-06-18 1977-12-22 Daimler Benz Ag Ceramic turbine wheel production process - uses profiled rotating tool for spark erosion or supersonic machining
DE2654055B2 (en) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor and stator disks for turbo molecular pumps
DE2717366B2 (en) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Impeller for a turbo molecular pump

Also Published As

Publication number Publication date
FR2458351A1 (en) 1981-01-02
FR2458351B1 (en) 1985-07-12
JPS56593A (en) 1981-01-07
JPS649475B2 (en) 1989-02-17
GB2052317A (en) 1981-01-28
DE2923632A1 (en) 1980-12-18
CH646229A5 (en) 1984-11-15

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20000422