JPS56593A - Rotor of turbomolecule pump and its manufacture - Google Patents

Rotor of turbomolecule pump and its manufacture

Info

Publication number
JPS56593A
JPS56593A JP7725380A JP7725380A JPS56593A JP S56593 A JPS56593 A JP S56593A JP 7725380 A JP7725380 A JP 7725380A JP 7725380 A JP7725380 A JP 7725380A JP S56593 A JPS56593 A JP S56593A
Authority
JP
Japan
Prior art keywords
turbomolecule
rotor
pump
manufacture
turbomolecule pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7725380A
Other languages
Japanese (ja)
Other versions
JPS649475B2 (en
Inventor
Shiyutsutsu Giyuntaa
Utsuseruman Edogaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of JPS56593A publication Critical patent/JPS56593A/en
Publication of JPS649475B2 publication Critical patent/JPS649475B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/02—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from one piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP7725380A 1979-06-11 1980-06-10 Rotor of turbomolecule pump and its manufacture Granted JPS56593A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792923632 DE2923632A1 (en) 1979-06-11 1979-06-11 METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE

Publications (2)

Publication Number Publication Date
JPS56593A true JPS56593A (en) 1981-01-07
JPS649475B2 JPS649475B2 (en) 1989-02-17

Family

ID=6072988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7725380A Granted JPS56593A (en) 1979-06-11 1980-06-10 Rotor of turbomolecule pump and its manufacture

Country Status (5)

Country Link
JP (1) JPS56593A (en)
CH (1) CH646229A5 (en)
DE (1) DE2923632A1 (en)
FR (1) FR2458351B1 (en)
GB (1) GB2052317B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (en) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 partition
JPS6136479A (en) * 1983-11-30 1986-02-21 八木　清行 Drive apparatus of foldable type automatic door
JPS61210293A (en) * 1985-03-01 1986-09-18 バルツェルスープファイファー・ゲーエムベーハー Disc having blade, method and apparatus for producing the same
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
US6474940B1 (en) 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
JP2016075276A (en) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー Method of manufacturing rotor disk or stator disk for vacuum pump and rotor disk or stator disk for vacuum pump

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
IT1293907B1 (en) * 1997-05-28 1999-03-11 Varian Spa MILLING PROCEDURE OF TURBOMOLECULAR PUMPS ROTORS WITH RESIN EMBOSSING OF THE PARTS TO BE MILLED.
DE10053664A1 (en) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanical kinetic vacuum pump
EP1249612B1 (en) * 2001-03-15 2004-01-28 VARIAN S.p.A. Method of manufacturing a stator stage for a turbine pump
EP2013483B1 (en) * 2006-04-29 2010-03-03 Oerlikon Leybold Vacuum GmbH Method for producing rotors or stators of a turbomolecular pump
DE102009015652A1 (en) * 2009-03-31 2010-10-07 Light Style Gmbh Method for manufacturing usage product made of aluminum, method involves manufacturing usage product by material-machining, particularly removing processing
DE102011117920B4 (en) * 2011-11-09 2013-08-01 Voith Patent Gmbh Method for producing a paddle wheel, and paddle wheel produced thereafter
EP3091235B1 (en) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotor disc
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227367Y1 (en) * 1975-09-30 1977-06-22

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH159747A (en) * 1930-01-11 1933-01-31 Westinghouse Electric Corp Propeller and process for its manufacture.
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
BE757354A (en) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2627309A1 (en) * 1976-06-18 1977-12-22 Daimler Benz Ag Ceramic turbine wheel production process - uses profiled rotating tool for spark erosion or supersonic machining
DE2654055B2 (en) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor and stator disks for turbo molecular pumps
DE2717366B2 (en) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Impeller for a turbo molecular pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227367Y1 (en) * 1975-09-30 1977-06-22

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (en) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 partition
JPS6136479A (en) * 1983-11-30 1986-02-21 八木　清行 Drive apparatus of foldable type automatic door
JPS61210293A (en) * 1985-03-01 1986-09-18 バルツェルスープファイファー・ゲーエムベーハー Disc having blade, method and apparatus for producing the same
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
US6474940B1 (en) 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
JP2016075276A (en) * 2014-10-02 2016-05-12 プファイファー・ヴァキューム・ゲーエムベーハー Method of manufacturing rotor disk or stator disk for vacuum pump and rotor disk or stator disk for vacuum pump

Also Published As

Publication number Publication date
FR2458351B1 (en) 1985-07-12
FR2458351A1 (en) 1981-01-02
GB2052317A (en) 1981-01-28
CH646229A5 (en) 1984-11-15
JPS649475B2 (en) 1989-02-17
GB2052317B (en) 1982-12-01
DE2923632A1 (en) 1980-12-18

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