JPS5655043A - Device for irradiating light - Google Patents

Device for irradiating light

Info

Publication number
JPS5655043A
JPS5655043A JP13075979A JP13075979A JPS5655043A JP S5655043 A JPS5655043 A JP S5655043A JP 13075979 A JP13075979 A JP 13075979A JP 13075979 A JP13075979 A JP 13075979A JP S5655043 A JPS5655043 A JP S5655043A
Authority
JP
Japan
Prior art keywords
light
center
irradiated
irradiating
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13075979A
Other languages
Japanese (ja)
Inventor
Manabu Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP13075979A priority Critical patent/JPS5655043A/en
Publication of JPS5655043A publication Critical patent/JPS5655043A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To uniformly expose by a device for irradiating a light when fabricating an IC by composing the device of an optical mechanism including an integrator for irradiating a light and a light source, an illumination correcting filter along the optical axis. CONSTITUTION:A light from a light source 1 is condensed by a condensing mirror 2, and the condensed light is irradiated by an integrator 3. An illumination correcting filter 5 is inserted to the optical path, and is freely moved along an optical axis L by a supporting mechanism. The filter is of a shape such as a circular shape at the front, of a shpae like a center low transmission type where the light transmissiblility becomes higher from the center toward the periphery or a center hight transmission type where the light transmissibility becomes lower from the center towad the periphery. Thus, the illumination of the surface to be irradiated can be equalized by suppressing the light transmission at the center by the filter when irradiating the light in such a manner that the light irradiation at the periphery of the area to be irradiated on the surface 4 to be irradiated becomes low. Then, the light utility ration is improved, and the device can be consequently utilized as an exposure light source for photoetching an IC.
JP13075979A 1979-10-12 1979-10-12 Device for irradiating light Pending JPS5655043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13075979A JPS5655043A (en) 1979-10-12 1979-10-12 Device for irradiating light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13075979A JPS5655043A (en) 1979-10-12 1979-10-12 Device for irradiating light

Publications (1)

Publication Number Publication Date
JPS5655043A true JPS5655043A (en) 1981-05-15

Family

ID=15041965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13075979A Pending JPS5655043A (en) 1979-10-12 1979-10-12 Device for irradiating light

Country Status (1)

Country Link
JP (1) JPS5655043A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169132A (en) * 1984-09-13 1986-04-09 Nippon Kogaku Kk <Nikon> Exposing device
JPH0249417A (en) * 1988-08-11 1990-02-19 Fuji Electric Co Ltd Formation of photoresist pattern
JPH07183188A (en) * 1993-12-22 1995-07-21 Nikon Corp Scanning type aligner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169132A (en) * 1984-09-13 1986-04-09 Nippon Kogaku Kk <Nikon> Exposing device
JPH0249417A (en) * 1988-08-11 1990-02-19 Fuji Electric Co Ltd Formation of photoresist pattern
JPH07183188A (en) * 1993-12-22 1995-07-21 Nikon Corp Scanning type aligner

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