JPS5646463A - Sample observing method - Google Patents

Sample observing method

Info

Publication number
JPS5646463A
JPS5646463A JP12335579A JP12335579A JPS5646463A JP S5646463 A JPS5646463 A JP S5646463A JP 12335579 A JP12335579 A JP 12335579A JP 12335579 A JP12335579 A JP 12335579A JP S5646463 A JPS5646463 A JP S5646463A
Authority
JP
Japan
Prior art keywords
sample
electron beam
irradiated
light
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12335579A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210381B2 (enrdf_load_stackoverflow
Inventor
Kazumichi Ogura
Masao Murota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP12335579A priority Critical patent/JPS5646463A/ja
Publication of JPS5646463A publication Critical patent/JPS5646463A/ja
Publication of JPH0210381B2 publication Critical patent/JPH0210381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Biological Materials (AREA)
  • Microscoopes, Condenser (AREA)
JP12335579A 1979-09-26 1979-09-26 Sample observing method Granted JPS5646463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12335579A JPS5646463A (en) 1979-09-26 1979-09-26 Sample observing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12335579A JPS5646463A (en) 1979-09-26 1979-09-26 Sample observing method

Publications (2)

Publication Number Publication Date
JPS5646463A true JPS5646463A (en) 1981-04-27
JPH0210381B2 JPH0210381B2 (enrdf_load_stackoverflow) 1990-03-07

Family

ID=14858518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12335579A Granted JPS5646463A (en) 1979-09-26 1979-09-26 Sample observing method

Country Status (1)

Country Link
JP (1) JPS5646463A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209365A (ja) * 1986-03-11 1987-09-14 Tamotsu Inoue 観察箱
JP2008300354A (ja) * 2007-05-31 2008-12-11 Fei Co 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209365A (ja) * 1986-03-11 1987-09-14 Tamotsu Inoue 観察箱
JP2008300354A (ja) * 2007-05-31 2008-12-11 Fei Co 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置

Also Published As

Publication number Publication date
JPH0210381B2 (enrdf_load_stackoverflow) 1990-03-07

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