JPS5645080A - Semiconductor displacement converter - Google Patents
Semiconductor displacement converterInfo
- Publication number
- JPS5645080A JPS5645080A JP12076079A JP12076079A JPS5645080A JP S5645080 A JPS5645080 A JP S5645080A JP 12076079 A JP12076079 A JP 12076079A JP 12076079 A JP12076079 A JP 12076079A JP S5645080 A JPS5645080 A JP S5645080A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- conducting member
- displacement converter
- stabilized
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 4
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE:To enable thermal expansion coefficients of a semiconductor displacement converter component parts to approximate each other, so that the characteristics in temperature variation are stabilized, by using SiC for a strain conducting membrane and Si for a strain detecting body. CONSTITUTION:Strain detecting bodies 2 are securely fixed using an adhesive 3 onto front and reverse sides of a strain conducting member 1, respective lead wires 4 are taken out from the member, and one end of the strain conducting member 1 is fixed to a housing 6 using a supporting body 5. In this constitution, the strain conducting member 1 is prepared as follows. A strain conducting member 11 is manufactured with a rectangularly solid SiC whose thermal expansion coefficient is similar to that of Si, and an attaching step 12 is provided on one end of this member for conduction of displacement of diaphragm by impression of external force. A fixing step 13 for fixing the member 11 to the supporting body is provided on the other end of the member 11, and a surface 14 on which the strain detecting body made of Si is securely attached is flattened. The characteristics of the displacement converter can be stabilized in this way, and since its mechanical strength is high, damage can be reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076079A JPS5645080A (en) | 1979-09-21 | 1979-09-21 | Semiconductor displacement converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076079A JPS5645080A (en) | 1979-09-21 | 1979-09-21 | Semiconductor displacement converter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5645080A true JPS5645080A (en) | 1981-04-24 |
Family
ID=14794307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076079A Pending JPS5645080A (en) | 1979-09-21 | 1979-09-21 | Semiconductor displacement converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5645080A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0098507A2 (en) * | 1982-07-02 | 1984-01-18 | Siemens Aktiengesellschaft | Integrated circuit sensor for force or displacement |
-
1979
- 1979-09-21 JP JP12076079A patent/JPS5645080A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0098507A2 (en) * | 1982-07-02 | 1984-01-18 | Siemens Aktiengesellschaft | Integrated circuit sensor for force or displacement |
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