JPS5642229A - New photooresist composition - Google Patents
New photooresist compositionInfo
- Publication number
- JPS5642229A JPS5642229A JP8527780A JP8527780A JPS5642229A JP S5642229 A JPS5642229 A JP S5642229A JP 8527780 A JP8527780 A JP 8527780A JP 8527780 A JP8527780 A JP 8527780A JP S5642229 A JPS5642229 A JP S5642229A
- Authority
- JP
- Japan
- Prior art keywords
- photooresist
- composition
- new
- photooresist composition
- new photooresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Polymerisation Methods In General (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5200779A | 1979-06-25 | 1979-06-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5642229A true JPS5642229A (en) | 1981-04-20 |
JPH0348500B2 JPH0348500B2 (enrdf_load_stackoverflow) | 1991-07-24 |
Family
ID=21974808
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8527880A Pending JPS5643220A (en) | 1979-06-25 | 1980-06-25 | Method of using novel nonlinear optical substance and diacetylenes |
JP8527780A Granted JPS5642229A (en) | 1979-06-25 | 1980-06-25 | New photooresist composition |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8527880A Pending JPS5643220A (en) | 1979-06-25 | 1980-06-25 | Method of using novel nonlinear optical substance and diacetylenes |
Country Status (1)
Country | Link |
---|---|
JP (2) | JPS5643220A (enrdf_load_stackoverflow) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5962608A (ja) * | 1982-10-02 | 1984-04-10 | Agency Of Ind Science & Technol | 薄膜状ポリジアセチレンの製造方法 |
JPS60239712A (ja) * | 1984-05-15 | 1985-11-28 | Canon Inc | 表示媒体 |
JPS6194042A (ja) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | 分子構築体およびその製造方法 |
JPS6194041A (ja) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS61180437A (ja) * | 1985-02-05 | 1986-08-13 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS61203448A (ja) * | 1985-03-05 | 1986-09-09 | Mitsubishi Petrochem Co Ltd | 光記録媒体 |
JPS6221151A (ja) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS62229240A (ja) * | 1986-03-31 | 1987-10-08 | Canon Inc | 重合性薄膜 |
JPS62262867A (ja) * | 1986-05-09 | 1987-11-14 | Matsushita Electric Ind Co Ltd | 単分子累積膜パタ−ン形成方法 |
JPS62293242A (ja) * | 1986-06-12 | 1987-12-19 | Matsushita Electric Ind Co Ltd | パターン形成方法およびパターン形成材料 |
JPS6381424A (ja) * | 1986-09-26 | 1988-04-12 | Sumitomo Chem Co Ltd | レジスト材料 |
JPS6396655A (ja) * | 1986-10-14 | 1988-04-27 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
US4804613A (en) * | 1983-10-14 | 1989-02-14 | Canon Kabushiki Kaisha | Optical recording medium and optical recording process using such medium |
JPH03103075A (ja) * | 1989-09-14 | 1991-04-30 | Hitachi Ltd | 電源装置及び加速器 |
WO1993004406A1 (en) * | 1991-08-13 | 1993-03-04 | Toray Industries, Inc. | Double-layer resist and method of and device for making said resist |
JP2006063045A (ja) * | 2004-08-30 | 2006-03-09 | National Institute Of Advanced Industrial & Technology | ジアセチレンジアミド化合物 |
JP2011510920A (ja) * | 2008-01-25 | 2011-04-07 | データレース リミテッド | 多色材料およびその用途 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61148432A (ja) * | 1984-12-21 | 1986-07-07 | Agency Of Ind Science & Technol | 光処理方法 |
JPS622175A (ja) * | 1985-06-28 | 1987-01-08 | Nippon Telegr & Teleph Corp <Ntt> | ケ−ブル試験器 |
JPH0670697B2 (ja) * | 1989-09-11 | 1994-09-07 | 理化学研究所 | 有機非線形光学材料 |
EP1431266B1 (en) | 2001-08-27 | 2006-07-19 | Japan Science and Technology Agency | Photoresponsive polymer, built-up type diacetylene polymer, crystals of ammonium carboxylates, and processes for production of them |
JP7238698B2 (ja) * | 2019-08-28 | 2023-03-14 | セイコーエプソン株式会社 | 量子干渉装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1525738A (fr) * | 1966-06-06 | 1968-05-17 | Battelle Development Corp | élément photosensible et procédé de formation d'image au moyen de cet élément |
DE1940690A1 (de) * | 1969-08-09 | 1971-02-25 | Basf Ag | Verfahren zur Herstellung von bildmaessigen Aufzeichnungen |
US4125534A (en) * | 1977-02-25 | 1978-11-14 | Allied Chemical Corporation | Carbazolyl diacetylenic compounds |
-
1980
- 1980-06-25 JP JP8527880A patent/JPS5643220A/ja active Pending
- 1980-06-25 JP JP8527780A patent/JPS5642229A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1525738A (fr) * | 1966-06-06 | 1968-05-17 | Battelle Development Corp | élément photosensible et procédé de formation d'image au moyen de cet élément |
DE1940690A1 (de) * | 1969-08-09 | 1971-02-25 | Basf Ag | Verfahren zur Herstellung von bildmaessigen Aufzeichnungen |
US4125534A (en) * | 1977-02-25 | 1978-11-14 | Allied Chemical Corporation | Carbazolyl diacetylenic compounds |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5962608A (ja) * | 1982-10-02 | 1984-04-10 | Agency Of Ind Science & Technol | 薄膜状ポリジアセチレンの製造方法 |
US4804613A (en) * | 1983-10-14 | 1989-02-14 | Canon Kabushiki Kaisha | Optical recording medium and optical recording process using such medium |
JPS60239712A (ja) * | 1984-05-15 | 1985-11-28 | Canon Inc | 表示媒体 |
JPS6194042A (ja) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | 分子構築体およびその製造方法 |
JPS6194041A (ja) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS61180437A (ja) * | 1985-02-05 | 1986-08-13 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS61203448A (ja) * | 1985-03-05 | 1986-09-09 | Mitsubishi Petrochem Co Ltd | 光記録媒体 |
JPS6221151A (ja) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPS62229240A (ja) * | 1986-03-31 | 1987-10-08 | Canon Inc | 重合性薄膜 |
JPS62262867A (ja) * | 1986-05-09 | 1987-11-14 | Matsushita Electric Ind Co Ltd | 単分子累積膜パタ−ン形成方法 |
JPS62293242A (ja) * | 1986-06-12 | 1987-12-19 | Matsushita Electric Ind Co Ltd | パターン形成方法およびパターン形成材料 |
JPS6381424A (ja) * | 1986-09-26 | 1988-04-12 | Sumitomo Chem Co Ltd | レジスト材料 |
JPS6396655A (ja) * | 1986-10-14 | 1988-04-27 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
JPH03103075A (ja) * | 1989-09-14 | 1991-04-30 | Hitachi Ltd | 電源装置及び加速器 |
WO1993004406A1 (en) * | 1991-08-13 | 1993-03-04 | Toray Industries, Inc. | Double-layer resist and method of and device for making said resist |
JP2006063045A (ja) * | 2004-08-30 | 2006-03-09 | National Institute Of Advanced Industrial & Technology | ジアセチレンジアミド化合物 |
JP2011510920A (ja) * | 2008-01-25 | 2011-04-07 | データレース リミテッド | 多色材料およびその用途 |
Also Published As
Publication number | Publication date |
---|---|
JPS5643220A (en) | 1981-04-21 |
JPH0348500B2 (enrdf_load_stackoverflow) | 1991-07-24 |
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