JPS5639517A - Position detecting method in optical scanning - Google Patents

Position detecting method in optical scanning

Info

Publication number
JPS5639517A
JPS5639517A JP11493579A JP11493579A JPS5639517A JP S5639517 A JPS5639517 A JP S5639517A JP 11493579 A JP11493579 A JP 11493579A JP 11493579 A JP11493579 A JP 11493579A JP S5639517 A JPS5639517 A JP S5639517A
Authority
JP
Japan
Prior art keywords
rotary mirror
interference fringes
optical scanning
specimen
photodetectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11493579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217725B2 (enrdf_load_stackoverflow
Inventor
Katsumi Kokubu
Masaharu Okafuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP11493579A priority Critical patent/JPS5639517A/ja
Publication of JPS5639517A publication Critical patent/JPS5639517A/ja
Publication of JPS6217725B2 publication Critical patent/JPS6217725B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP11493579A 1979-09-07 1979-09-07 Position detecting method in optical scanning Granted JPS5639517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11493579A JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11493579A JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Publications (2)

Publication Number Publication Date
JPS5639517A true JPS5639517A (en) 1981-04-15
JPS6217725B2 JPS6217725B2 (enrdf_load_stackoverflow) 1987-04-20

Family

ID=14650295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11493579A Granted JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Country Status (1)

Country Link
JP (1) JPS5639517A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333834A (ja) * 1986-07-28 1988-02-13 Canon Inc 表面状態検査装置
JPS63124941A (ja) * 1986-11-14 1988-05-28 Hitachi Electronics Eng Co Ltd 走査位置検出方式
US4834477A (en) * 1984-07-05 1989-05-30 Ricoh Company, Ltd. Method of controlling the temperature of semiconductor laser in an optical device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4834477A (en) * 1984-07-05 1989-05-30 Ricoh Company, Ltd. Method of controlling the temperature of semiconductor laser in an optical device
JPS6333834A (ja) * 1986-07-28 1988-02-13 Canon Inc 表面状態検査装置
JPS63124941A (ja) * 1986-11-14 1988-05-28 Hitachi Electronics Eng Co Ltd 走査位置検出方式

Also Published As

Publication number Publication date
JPS6217725B2 (enrdf_load_stackoverflow) 1987-04-20

Similar Documents

Publication Publication Date Title
JPS5849819B2 (ja) ソウサシキケンサソウチ
GB1413666A (en) Scanning system for scanning an object with energy
EP0379226A3 (en) Ranging apparatus
GB1400253A (en) Gauging dimensions
SE7514389L (sv) Forfarande for opto-elektronisk positionsavkenning och inspektion samt for utforande av forfarandet avsedd anordning
JPS6036908A (ja) 三角測量原理に基づく測定法を用いる、物体表面上の点と基準レベルとの間の距離を非接触的に測定するための測量方法
GB1449050A (en) Device for determining the location of orientation of an object in a designated environment
JPS5639517A (en) Position detecting method in optical scanning
EP0380046A3 (de) Verfahren zur Prüfung von Zählern, insbesondere von Elektrizitäts-, Gas- und Wasser-zählern sowie Vorrichtung zur Durchführung des Verfahrens
GB1584452A (en) Optical scanners
JPS5483853A (en) Measuring device
JPS57197422A (en) Detector for rotating angle
JPS55117946A (en) Flaw detection method of hollow shaft inside surface
JPS5593003A (en) Measuring method for plate thickness of plate-shape transparent body
JPS5255657A (en) Photoelectric type range finding system
GB1484148A (en) Apparatus for determining the transverse position of a surface defect in a sheet material moving longitudinally
JPS55149804A (en) Profile measuring apparatus for accumulated matter in high blast furnace
JPS5459166A (en) Visual sensibility measuring apparatus of interferometer
JPS5728239A (en) Inspection of defect on cylinder surface
SU920371A1 (ru) Трехкоординатное углоизмерительное устройство
JPS61501721A (ja) 無接触な運動測定方法及び装置
RU1783300C (ru) Способ измерени толщины ленты и устройство дл его осуществлени
JPS5614902A (en) Measuring device
RU1789851C (ru) Устройство дл контрол толщины плоских объектов
JPH04106732U (ja) 干渉計