JPS5639517A - Position detecting method in optical scanning - Google Patents

Position detecting method in optical scanning

Info

Publication number
JPS5639517A
JPS5639517A JP11493579A JP11493579A JPS5639517A JP S5639517 A JPS5639517 A JP S5639517A JP 11493579 A JP11493579 A JP 11493579A JP 11493579 A JP11493579 A JP 11493579A JP S5639517 A JPS5639517 A JP S5639517A
Authority
JP
Japan
Prior art keywords
rotary mirror
interference fringes
optical scanning
specimen
photodetectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11493579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217725B2 (enrdf_load_stackoverflow
Inventor
Katsumi Kokubu
Masaharu Okafuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP11493579A priority Critical patent/JPS5639517A/ja
Publication of JPS5639517A publication Critical patent/JPS5639517A/ja
Publication of JPS6217725B2 publication Critical patent/JPS6217725B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP11493579A 1979-09-07 1979-09-07 Position detecting method in optical scanning Granted JPS5639517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11493579A JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11493579A JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Publications (2)

Publication Number Publication Date
JPS5639517A true JPS5639517A (en) 1981-04-15
JPS6217725B2 JPS6217725B2 (enrdf_load_stackoverflow) 1987-04-20

Family

ID=14650295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11493579A Granted JPS5639517A (en) 1979-09-07 1979-09-07 Position detecting method in optical scanning

Country Status (1)

Country Link
JP (1) JPS5639517A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333834A (ja) * 1986-07-28 1988-02-13 Canon Inc 表面状態検査装置
JPS63124941A (ja) * 1986-11-14 1988-05-28 Hitachi Electronics Eng Co Ltd 走査位置検出方式
US4834477A (en) * 1984-07-05 1989-05-30 Ricoh Company, Ltd. Method of controlling the temperature of semiconductor laser in an optical device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4834477A (en) * 1984-07-05 1989-05-30 Ricoh Company, Ltd. Method of controlling the temperature of semiconductor laser in an optical device
JPS6333834A (ja) * 1986-07-28 1988-02-13 Canon Inc 表面状態検査装置
JPS63124941A (ja) * 1986-11-14 1988-05-28 Hitachi Electronics Eng Co Ltd 走査位置検出方式

Also Published As

Publication number Publication date
JPS6217725B2 (enrdf_load_stackoverflow) 1987-04-20

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