JPS5638755A - Sample location displaying device - Google Patents

Sample location displaying device

Info

Publication number
JPS5638755A
JPS5638755A JP11388579A JP11388579A JPS5638755A JP S5638755 A JPS5638755 A JP S5638755A JP 11388579 A JP11388579 A JP 11388579A JP 11388579 A JP11388579 A JP 11388579A JP S5638755 A JPS5638755 A JP S5638755A
Authority
JP
Japan
Prior art keywords
sample
location
voltage
displaying
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11388579A
Other languages
English (en)
Inventor
Masashi Otaka
Masahiro Kobayashi
Harumi Takenami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11388579A priority Critical patent/JPS5638755A/ja
Publication of JPS5638755A publication Critical patent/JPS5638755A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
JP11388579A 1979-09-05 1979-09-05 Sample location displaying device Pending JPS5638755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11388579A JPS5638755A (en) 1979-09-05 1979-09-05 Sample location displaying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11388579A JPS5638755A (en) 1979-09-05 1979-09-05 Sample location displaying device

Publications (1)

Publication Number Publication Date
JPS5638755A true JPS5638755A (en) 1981-04-14

Family

ID=14623558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11388579A Pending JPS5638755A (en) 1979-09-05 1979-09-05 Sample location displaying device

Country Status (1)

Country Link
JP (1) JPS5638755A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713659A (en) * 1980-05-31 1982-01-23 Zeiss Stiftung Particle beam device with adjustably movable object holder for two coordinates
JPS5875749A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 荷電粒子線分析装置の試料位置表示装置
JPS5941967U (ja) * 1982-09-09 1984-03-17 日本電子テクニクス株式会社 走査電子顕微鏡等における試料位置表示装置
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
CN104316627A (zh) * 2014-11-06 2015-01-28 上海仪电分析仪器有限公司 气相色谱仪气体流量自动显示装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713659A (en) * 1980-05-31 1982-01-23 Zeiss Stiftung Particle beam device with adjustably movable object holder for two coordinates
JPS5875749A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 荷電粒子線分析装置の試料位置表示装置
JPS5941967U (ja) * 1982-09-09 1984-03-17 日本電子テクニクス株式会社 走査電子顕微鏡等における試料位置表示装置
JPH0228605Y2 (ja) * 1982-09-09 1990-07-31
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
CN104316627A (zh) * 2014-11-06 2015-01-28 上海仪电分析仪器有限公司 气相色谱仪气体流量自动显示装置

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