JPS5713659A - Particle beam device with adjustably movable object holder for two coordinates - Google Patents

Particle beam device with adjustably movable object holder for two coordinates

Info

Publication number
JPS5713659A
JPS5713659A JP8120081A JP8120081A JPS5713659A JP S5713659 A JPS5713659 A JP S5713659A JP 8120081 A JP8120081 A JP 8120081A JP 8120081 A JP8120081 A JP 8120081A JP S5713659 A JPS5713659 A JP S5713659A
Authority
JP
Japan
Prior art keywords
coordinates
particle beam
movable object
beam device
object holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8120081A
Other languages
Japanese (ja)
Inventor
Giyutsutaa Erunsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of JPS5713659A publication Critical patent/JPS5713659A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electron Beam Exposure (AREA)
JP8120081A 1980-05-31 1981-05-29 Particle beam device with adjustably movable object holder for two coordinates Pending JPS5713659A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803020703 DE3020703A1 (en) 1980-05-31 1980-05-31 Coordinate table measured on electron microscope - uses non-contact inductive sensor and control rod to provide coordinate position measurement data

Publications (1)

Publication Number Publication Date
JPS5713659A true JPS5713659A (en) 1982-01-23

Family

ID=6103649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8120081A Pending JPS5713659A (en) 1980-05-31 1981-05-29 Particle beam device with adjustably movable object holder for two coordinates

Country Status (3)

Country Link
JP (1) JPS5713659A (en)
DE (1) DE3020703A1 (en)
NL (1) NL8102407A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8301033A (en) * 1983-03-23 1984-10-16 Philips Nv RADIANT WITH MEMBRANE DRIVE FOR AN OBJECT CARRIER.
AT383439B (en) * 1985-11-04 1987-07-10 Akad Wissenschaften Ddr Apparatus for loading devices of dry etching installations

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638755A (en) * 1979-09-05 1981-04-14 Mitsubishi Electric Corp Sample location displaying device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638755A (en) * 1979-09-05 1981-04-14 Mitsubishi Electric Corp Sample location displaying device

Also Published As

Publication number Publication date
NL8102407A (en) 1981-12-16
DE3020703A1 (en) 1981-12-10

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