JPS5636139A - Detecting method for substrate of semiconductor device - Google Patents

Detecting method for substrate of semiconductor device

Info

Publication number
JPS5636139A
JPS5636139A JP11117079A JP11117079A JPS5636139A JP S5636139 A JPS5636139 A JP S5636139A JP 11117079 A JP11117079 A JP 11117079A JP 11117079 A JP11117079 A JP 11117079A JP S5636139 A JPS5636139 A JP S5636139A
Authority
JP
Japan
Prior art keywords
substrate
light
convex mirror
projector
projected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11117079A
Other languages
English (en)
Inventor
Nobuo Sasaki
Motoo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11117079A priority Critical patent/JPS5636139A/ja
Publication of JPS5636139A publication Critical patent/JPS5636139A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP11117079A 1979-08-31 1979-08-31 Detecting method for substrate of semiconductor device Pending JPS5636139A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11117079A JPS5636139A (en) 1979-08-31 1979-08-31 Detecting method for substrate of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11117079A JPS5636139A (en) 1979-08-31 1979-08-31 Detecting method for substrate of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5636139A true JPS5636139A (en) 1981-04-09

Family

ID=14554247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11117079A Pending JPS5636139A (en) 1979-08-31 1979-08-31 Detecting method for substrate of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5636139A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132637U (ja) * 1983-02-24 1984-09-05 日本電気ホームエレクトロニクス株式会社 ウエ−ハ搬送装置
JPH0272544U (ja) * 1988-11-18 1990-06-01
JPH02148752A (ja) * 1988-11-29 1990-06-07 Metsukusu:Kk シリコンウエハーの自動搬送装置用吸着ハンド
JPH0494901U (ja) * 1991-01-11 1992-08-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132637U (ja) * 1983-02-24 1984-09-05 日本電気ホームエレクトロニクス株式会社 ウエ−ハ搬送装置
JPH0272544U (ja) * 1988-11-18 1990-06-01
JPH02148752A (ja) * 1988-11-29 1990-06-07 Metsukusu:Kk シリコンウエハーの自動搬送装置用吸着ハンド
JPH0494901U (ja) * 1991-01-11 1992-08-18

Similar Documents

Publication Publication Date Title
JPS57153433A (en) Manufacturing device for semiconductor
JPS5212577A (en) Automatic location device
JPS54128682A (en) Automatic detector for foreign matters
JPS56168104A (en) Detector for mark position
JPS5636139A (en) Detecting method for substrate of semiconductor device
EP0358425A3 (en) Position detecting method and apparatus
JPS5429977A (en) Detection system for position
JPS5355983A (en) Automatic micro defect detector
JPS5252664A (en) Detector for liquid level
JPS5376055A (en) Method of position detection
JPS54111858A (en) Distance detector
GB1547508A (en) Apparatus for detecting the presence of foreign bodies in bottles
JPS5710172A (en) Original size detecting method of copying machine
JPS52145249A (en) Object detecting apparatus
JPS54134992A (en) Semiconductor device
JPS52143878A (en) Silicon wafer defect detector
JPS55158505A (en) Knifed mark inspector
JPS5382492A (en) Surface inspecting method
JPS5327449A (en) Thickness measuring system for running body
JPS5348789A (en) Vibration detector
JPS56644A (en) Abrasion detector
JPS5648546A (en) Crack detector
JPS556221A (en) Fallen bottle detector
JPS57181434A (en) Position detector for head in disc storage device
JPS5337454A (en) Distance measuring device