JPS5632740A - Defect observing apparatus - Google Patents

Defect observing apparatus

Info

Publication number
JPS5632740A
JPS5632740A JP10814279A JP10814279A JPS5632740A JP S5632740 A JPS5632740 A JP S5632740A JP 10814279 A JP10814279 A JP 10814279A JP 10814279 A JP10814279 A JP 10814279A JP S5632740 A JPS5632740 A JP S5632740A
Authority
JP
Japan
Prior art keywords
defective portion
observing
observing unit
defective
coordinates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10814279A
Other languages
Japanese (ja)
Inventor
Junzo Yamada
Koji Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10814279A priority Critical patent/JPS5632740A/en
Publication of JPS5632740A publication Critical patent/JPS5632740A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To accelerate the positioning speed of an observing unit to a defective portion in the defect observing apparatus by automatically judging the defective portion from the result of a function test of an automatic measuring instrument and transmitting the pattern coordinates of the defective portion to the observing unit, thereby observing the defective portion. CONSTITUTION:A variety of test signals are fed from the automatic measuring instrument 2 to an IC1, the test results are stored in a failure memory 4 of an impropriety analyzer 3, which thereupon judge the improper portion. The defective position is converted to the pattern coordinates of the IC, and is then transmitted through a drive circuit to an observing unit 5. The observing unit 5 is automatically positioned to the IC1 with X and Y coordinates, and the defective portion is thus observed. Since the defective portion of the IC1 is accordingly automatically searched by the observing unit 5, the defective portion can be easily observed.
JP10814279A 1979-08-27 1979-08-27 Defect observing apparatus Pending JPS5632740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10814279A JPS5632740A (en) 1979-08-27 1979-08-27 Defect observing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10814279A JPS5632740A (en) 1979-08-27 1979-08-27 Defect observing apparatus

Publications (1)

Publication Number Publication Date
JPS5632740A true JPS5632740A (en) 1981-04-02

Family

ID=14476994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10814279A Pending JPS5632740A (en) 1979-08-27 1979-08-27 Defect observing apparatus

Country Status (1)

Country Link
JP (1) JPS5632740A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496656A (en) * 1992-06-30 1996-03-05 Yuasa Corporation Battery

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232555A (en) * 1975-09-05 1977-03-11 Nippon Kogaku Kk <Nikon> Constant voltage circuit with temperature characteristics variable
JPS539508A (en) * 1976-07-14 1978-01-28 Nec Corp Magnetic recording and playback system
JPS5322033A (en) * 1976-08-03 1978-03-01 Kubota Ltd Agricultural combine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232555A (en) * 1975-09-05 1977-03-11 Nippon Kogaku Kk <Nikon> Constant voltage circuit with temperature characteristics variable
JPS539508A (en) * 1976-07-14 1978-01-28 Nec Corp Magnetic recording and playback system
JPS5322033A (en) * 1976-08-03 1978-03-01 Kubota Ltd Agricultural combine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496656A (en) * 1992-06-30 1996-03-05 Yuasa Corporation Battery

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