JPS5629844A - Manufacture for magnetic recording medium - Google Patents

Manufacture for magnetic recording medium

Info

Publication number
JPS5629844A
JPS5629844A JP10650679A JP10650679A JPS5629844A JP S5629844 A JPS5629844 A JP S5629844A JP 10650679 A JP10650679 A JP 10650679A JP 10650679 A JP10650679 A JP 10650679A JP S5629844 A JPS5629844 A JP S5629844A
Authority
JP
Japan
Prior art keywords
nonmagnetic
cooling
vacuum chamber
support
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10650679A
Other languages
Japanese (ja)
Inventor
Ryuji Shirahata
Tatsuji Kitamoto
Goro Akashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP10650679A priority Critical patent/JPS5629844A/en
Publication of JPS5629844A publication Critical patent/JPS5629844A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To increase the adhesion between the magnetic substance thin film and the substrate, by forming the nonmagnetic metal layer on the nonmagnetic support with ion plating method and forming the ferromagnetic metal thin film on it with vacuum deposition. CONSTITUTION:The nonmagnetic support 5 of tape shape such as polyethyleneterephthalate is moved to the vacuum chamber 2 from the supply roll 6 located in the vacuum chamber 1 via the cooling can 7, and guide roller 8 and wound on the roll 11 via the guide roller 9 and cooling can 10. Further, in the vacuum chamber 1, the nonmagnetic evaporation source 12 and the high-frequency electrode 13 are located, and the nonmagnetic metal is ion-plated with high frequency on the support 5 moving along the cooling can 7. Further, in the vacuum chamber 2, the magnetic metal evaporation source 16 and the shielding mask 17 are provided to form the magnetic thin film when the support 5 moves along the cooling can 10.
JP10650679A 1979-08-21 1979-08-21 Manufacture for magnetic recording medium Pending JPS5629844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10650679A JPS5629844A (en) 1979-08-21 1979-08-21 Manufacture for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10650679A JPS5629844A (en) 1979-08-21 1979-08-21 Manufacture for magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5629844A true JPS5629844A (en) 1981-03-25

Family

ID=14435305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10650679A Pending JPS5629844A (en) 1979-08-21 1979-08-21 Manufacture for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5629844A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61174371A (en) * 1985-01-28 1986-08-06 Hitachi Ltd Thin film forming device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61174371A (en) * 1985-01-28 1986-08-06 Hitachi Ltd Thin film forming device

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