JPS5629324A - Etching of metallic electrode - Google Patents
Etching of metallic electrodeInfo
- Publication number
- JPS5629324A JPS5629324A JP10403579A JP10403579A JPS5629324A JP S5629324 A JPS5629324 A JP S5629324A JP 10403579 A JP10403579 A JP 10403579A JP 10403579 A JP10403579 A JP 10403579A JP S5629324 A JPS5629324 A JP S5629324A
- Authority
- JP
- Japan
- Prior art keywords
- concentrated
- hydrogen peroxide
- aqueous hydrogen
- etching
- fluoric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/26—Acidic compositions for etching refractory metals
Abstract
PURPOSE:To enable etching of Nb or T a metal in high reproducibility and controllability, by particularly reducing the mixing ratio of aqueous hydrogen peroxide to concentrated fluoric acid in a mixed solution of concentrated sulfuric acid, water, concentrated aqueous hydrogen peroxide and concentrated fluoric acid. CONSTITUTION:A metallic electrode containing Nb or Ta as main ingredients is etched by a solution obtained by mixing at volumetric ratio 30-50 of concentrated sulfuric acid, 45-65 of water, 0.2-3.0 of concentrated aqueous hydrogen peroxide and 1.0-5.0 of concentrated fluoric acid. By reducing the mixing ratio of the concentrated aqueous hydrogen peroxide and the concentrated fluoric acid particularly in this manner to suppress the etching rate of semiconductors, insulating films and metals other than Nb and Ta, Nb or Ta may be selectively etched in high reproducibility. If the solution temperature becomes lower than 0 deg.C the etching rate is abruptly decelerated, while if it becomes higher than 50 deg.C, uniform etching becomes impossible, and so it is preferred that the solution temperature is kept in the range of 0-50 deg.C.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10403579A JPS5629324A (en) | 1979-08-17 | 1979-08-17 | Etching of metallic electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10403579A JPS5629324A (en) | 1979-08-17 | 1979-08-17 | Etching of metallic electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5629324A true JPS5629324A (en) | 1981-03-24 |
Family
ID=14369965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10403579A Pending JPS5629324A (en) | 1979-08-17 | 1979-08-17 | Etching of metallic electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5629324A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4704188A (en) * | 1983-12-23 | 1987-11-03 | Honeywell Inc. | Wet chemical etching of crxsiynz |
JPH01316473A (en) * | 1988-06-16 | 1989-12-21 | Agency Of Ind Science & Technol | Method for etching niobium film |
US6461978B1 (en) | 1998-10-23 | 2002-10-08 | Lg. Philips Lcd Co., Ltd. | Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
JP2004204266A (en) * | 2002-12-24 | 2004-07-22 | Tosoh Corp | Composition for dissolving tantalum, and dissolving method using the same |
CN108085684A (en) * | 2017-11-23 | 2018-05-29 | 中国科学院近代物理研究所 | For going the chemical decoating liquid of copper removal surface niobium coating and strip method |
-
1979
- 1979-08-17 JP JP10403579A patent/JPS5629324A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4704188A (en) * | 1983-12-23 | 1987-11-03 | Honeywell Inc. | Wet chemical etching of crxsiynz |
JPH01316473A (en) * | 1988-06-16 | 1989-12-21 | Agency Of Ind Science & Technol | Method for etching niobium film |
US6461978B1 (en) | 1998-10-23 | 2002-10-08 | Lg. Philips Lcd Co., Ltd. | Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
US7101809B2 (en) | 1998-10-23 | 2006-09-05 | Lg.Philips Lcd Co., Ltd. | Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
US7202165B2 (en) | 1998-10-23 | 2007-04-10 | Lg.Philips Lcd Co., Ltd | Electronic device having a stacked wiring layer including Al and Ti |
DE19951055B4 (en) * | 1998-10-23 | 2017-08-24 | Lg Display Co., Ltd. | A method of manufacturing a substrate for electronic devices using an etchant |
JP2004204266A (en) * | 2002-12-24 | 2004-07-22 | Tosoh Corp | Composition for dissolving tantalum, and dissolving method using the same |
CN108085684A (en) * | 2017-11-23 | 2018-05-29 | 中国科学院近代物理研究所 | For going the chemical decoating liquid of copper removal surface niobium coating and strip method |
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