JPS5626481A - Tunnel type superconductive element and the manufacturing process thereof - Google Patents
Tunnel type superconductive element and the manufacturing process thereofInfo
- Publication number
- JPS5626481A JPS5626481A JP10305379A JP10305379A JPS5626481A JP S5626481 A JPS5626481 A JP S5626481A JP 10305379 A JP10305379 A JP 10305379A JP 10305379 A JP10305379 A JP 10305379A JP S5626481 A JPS5626481 A JP S5626481A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- barrier layer
- tunnelling
- superconductive
- manufacturing process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000004888 barrier function Effects 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005755 formation reaction Methods 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To obtain a satisfactory tunnelling characteristic by obtaining a barrier layer of a prescribed thickness, when providing No.1 and No.2 superconductive electrodes, which are crossing each other and extended, on a substrate through a tunnelling barrier layer, by using particular materials for the barrier layer and the electrodes. CONSTITUTION:A No.1 superconductive electrode 2 is attached onto a substrate 1, and a No.2 superconductive electrode 4 which is crossing the electrode 2 and extending is formed on the electrode 2 through a tunnelling barrier layer 3. In this constitution, the formations are done by conducting spattering in an inert gas atmosphere using special materials as follows. Nb is used for the No.1 electrode 2, Nb or deltaNbN is used for the No.2 electrode 4, and as for the material for the barrier layer 3 betaNb2N or epsilonNbN is selected. It is possible, by doing so, to obtain the barrier layer 3 of a prescribed thickness and also to obtain a satisfactory tunnelling characteristic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10305379A JPS5626481A (en) | 1979-08-13 | 1979-08-13 | Tunnel type superconductive element and the manufacturing process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10305379A JPS5626481A (en) | 1979-08-13 | 1979-08-13 | Tunnel type superconductive element and the manufacturing process thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5626481A true JPS5626481A (en) | 1981-03-14 |
| JPS5753676B2 JPS5753676B2 (en) | 1982-11-13 |
Family
ID=14343921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10305379A Granted JPS5626481A (en) | 1979-08-13 | 1979-08-13 | Tunnel type superconductive element and the manufacturing process thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5626481A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1365456A2 (en) * | 2002-05-22 | 2003-11-26 | National Institute of Advanced Industrial Science and Technology | Josephson junction |
-
1979
- 1979-08-13 JP JP10305379A patent/JPS5626481A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1365456A2 (en) * | 2002-05-22 | 2003-11-26 | National Institute of Advanced Industrial Science and Technology | Josephson junction |
| EP1365456A3 (en) * | 2002-05-22 | 2004-12-22 | National Institute of Advanced Industrial Science and Technology | Josephson junction |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5753676B2 (en) | 1982-11-13 |
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