JPS5625733A - Pattern forming method - Google Patents
Pattern forming methodInfo
- Publication number
- JPS5625733A JPS5625733A JP10126179A JP10126179A JPS5625733A JP S5625733 A JPS5625733 A JP S5625733A JP 10126179 A JP10126179 A JP 10126179A JP 10126179 A JP10126179 A JP 10126179A JP S5625733 A JPS5625733 A JP S5625733A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- heating
- absorbing material
- light absorbing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000011358 absorbing material Substances 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 abstract 1
- 238000004043 dyeing Methods 0.000 abstract 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 229920002554 vinyl polymer Polymers 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10126179A JPS5625733A (en) | 1979-08-10 | 1979-08-10 | Pattern forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10126179A JPS5625733A (en) | 1979-08-10 | 1979-08-10 | Pattern forming method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5625733A true JPS5625733A (en) | 1981-03-12 |
JPS6210419B2 JPS6210419B2 (enrdf_load_stackoverflow) | 1987-03-06 |
Family
ID=14295964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10126179A Granted JPS5625733A (en) | 1979-08-10 | 1979-08-10 | Pattern forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5625733A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4414317A (en) * | 1982-04-21 | 1983-11-08 | Armstrong World Industries, Inc. | Transparency, a method for forming it and a photographic mask whose optical densities are correlated with the contour of a surface |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009190973A (ja) * | 2008-02-12 | 2009-08-27 | Sumitomo Chemical Co Ltd | アゾ化合物 |
-
1979
- 1979-08-10 JP JP10126179A patent/JPS5625733A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4414317A (en) * | 1982-04-21 | 1983-11-08 | Armstrong World Industries, Inc. | Transparency, a method for forming it and a photographic mask whose optical densities are correlated with the contour of a surface |
Also Published As
Publication number | Publication date |
---|---|
JPS6210419B2 (enrdf_load_stackoverflow) | 1987-03-06 |
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