JPS5618358A - Field mover for electron microscope - Google Patents

Field mover for electron microscope

Info

Publication number
JPS5618358A
JPS5618358A JP9215879A JP9215879A JPS5618358A JP S5618358 A JPS5618358 A JP S5618358A JP 9215879 A JP9215879 A JP 9215879A JP 9215879 A JP9215879 A JP 9215879A JP S5618358 A JPS5618358 A JP S5618358A
Authority
JP
Japan
Prior art keywords
deflection
pulse generator
magnification
frequency
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9215879A
Other languages
Japanese (ja)
Inventor
Hiroshi Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9215879A priority Critical patent/JPS5618358A/en
Publication of JPS5618358A publication Critical patent/JPS5618358A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To electrically move a field of via smoothly by controlling the deflection for the sample irradiation electron beam depending upon the operation time of the move indication. CONSTITUTION:A pulse generator 11 generates pulses at the frequency which corresponds to the observing magnification by the operation of an operation circuit 14. A counting circuit 12 counts it and supplies the deflection signals which correspond to the counting value to deflection coils 9a and 9b by a DA converter B and a deflection power supply 10. The movement of the field of view is proportional to the frequency of the pulse generator 11. By the operation of a magnification control circuit 8, an intermediate lens 3 and a projection lens 4 are controlled and the magnification can be changed. As a result, the oscillation frequency of the pulse generator 11 is also changed.
JP9215879A 1979-07-20 1979-07-20 Field mover for electron microscope Pending JPS5618358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9215879A JPS5618358A (en) 1979-07-20 1979-07-20 Field mover for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9215879A JPS5618358A (en) 1979-07-20 1979-07-20 Field mover for electron microscope

Publications (1)

Publication Number Publication Date
JPS5618358A true JPS5618358A (en) 1981-02-21

Family

ID=14046611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9215879A Pending JPS5618358A (en) 1979-07-20 1979-07-20 Field mover for electron microscope

Country Status (1)

Country Link
JP (1) JPS5618358A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676877A (en) * 1984-03-16 1987-06-30 Societe de Promotion des Procedes Hydro-Metallurgiques Process for production of fine and ultrafine zinc powders by electrolysis in a basic medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676877A (en) * 1984-03-16 1987-06-30 Societe de Promotion des Procedes Hydro-Metallurgiques Process for production of fine and ultrafine zinc powders by electrolysis in a basic medium

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