JPS56169309A - Magnetic thin film material - Google Patents
Magnetic thin film materialInfo
- Publication number
- JPS56169309A JPS56169309A JP7251180A JP7251180A JPS56169309A JP S56169309 A JPS56169309 A JP S56169309A JP 7251180 A JP7251180 A JP 7251180A JP 7251180 A JP7251180 A JP 7251180A JP S56169309 A JPS56169309 A JP S56169309A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- substrate
- parts
- prescribed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
- H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Hall/Mr Elements (AREA)
Abstract
PURPOSE:To obtain the magnetic thin film having the prescribed magnetic anisotropy without applying magnetic field to the piled magnetic film by a method wherein a magnetic material is formed in the thin film type by piling on a substrate being formed with convex and concave parts in stripe shape in the prescribed direction. CONSTITUTION:After the thin film of an electric insulator is formed on the whole surface of a substrate 1 of glass, etc., by the sputtering method, etc., parts of the insulator are removed by photoetching, and the stripe shaped convex parts 3a are formed with the insulator 2 on the surface of the substrate 1. Then the thin film of a magnetic material of permalloy, etc., is piled on the substrate having the stripe shaped concave and convex parts by sputtering method, electron beam method, etc., to form the magnetic thin film 4. The magnetic thin film formed by this way generates magnetic anisotropy having an orientation in the longitudinal direction of the stripe shaped concave and convex parts, namely in the direction shown with an arrow mark A. Accordingly the magnetic thin film having the prescribed magnetic anisotropy can be obtained without applying magnetic field to the material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7251180A JPS56169309A (en) | 1980-05-30 | 1980-05-30 | Magnetic thin film material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7251180A JPS56169309A (en) | 1980-05-30 | 1980-05-30 | Magnetic thin film material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56169309A true JPS56169309A (en) | 1981-12-26 |
Family
ID=13491434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7251180A Pending JPS56169309A (en) | 1980-05-30 | 1980-05-30 | Magnetic thin film material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56169309A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6045919A (en) * | 1983-08-23 | 1985-03-12 | Fujitsu Ltd | Substrate for thin film magnetic head and forming method of magnetic pole |
US6136458A (en) * | 1997-09-13 | 2000-10-24 | Kabushiki Kaisha Toshiba | Ferrite magnetic film structure having magnetic anisotropy |
-
1980
- 1980-05-30 JP JP7251180A patent/JPS56169309A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6045919A (en) * | 1983-08-23 | 1985-03-12 | Fujitsu Ltd | Substrate for thin film magnetic head and forming method of magnetic pole |
US6136458A (en) * | 1997-09-13 | 2000-10-24 | Kabushiki Kaisha Toshiba | Ferrite magnetic film structure having magnetic anisotropy |
US6335050B1 (en) | 1997-09-13 | 2002-01-01 | Kabushiki Kaisha Toshiba | Method of manufacturing a ferrite magnetic film structure having magnetic anisotropy |
US6611035B2 (en) | 1997-09-13 | 2003-08-26 | Kabushiki Kaisha Toshiba | Ferrite magnetic film structure having magnetic anisotropy, method of manufacturing the same, and planar magnetic device employing ferrite magnetic film structure having magenetic anisotropy |
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