JPS5616804A - Pattern check unit of printed circuit board - Google Patents

Pattern check unit of printed circuit board

Info

Publication number
JPS5616804A
JPS5616804A JP9267679A JP9267679A JPS5616804A JP S5616804 A JPS5616804 A JP S5616804A JP 9267679 A JP9267679 A JP 9267679A JP 9267679 A JP9267679 A JP 9267679A JP S5616804 A JPS5616804 A JP S5616804A
Authority
JP
Japan
Prior art keywords
light
wiring surface
pattern information
shoulder part
hole shoulder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9267679A
Other languages
English (en)
Other versions
JPS6017044B2 (ja
Inventor
Koichi Tsukazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP54092676A priority Critical patent/JPS6017044B2/ja
Priority to US06/171,265 priority patent/US4421410A/en
Publication of JPS5616804A publication Critical patent/JPS5616804A/ja
Publication of JPS6017044B2 publication Critical patent/JPS6017044B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Input (AREA)
JP54092676A 1979-07-23 1979-07-23 印刷配線板のパタ−ン検査装置 Expired JPS6017044B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP54092676A JPS6017044B2 (ja) 1979-07-23 1979-07-23 印刷配線板のパタ−ン検査装置
US06/171,265 US4421410A (en) 1979-07-23 1980-07-22 Method and apparatus for inspecting printed wiring boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54092676A JPS6017044B2 (ja) 1979-07-23 1979-07-23 印刷配線板のパタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS5616804A true JPS5616804A (en) 1981-02-18
JPS6017044B2 JPS6017044B2 (ja) 1985-04-30

Family

ID=14061078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54092676A Expired JPS6017044B2 (ja) 1979-07-23 1979-07-23 印刷配線板のパタ−ン検査装置

Country Status (2)

Country Link
US (1) US4421410A (ja)
JP (1) JPS6017044B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984001212A1 (en) * 1982-09-20 1984-03-29 Contrex Inc Automatic semiconductor surface inspection apparatus and method
JPS5999304A (ja) * 1982-11-30 1984-06-08 Asahi Optical Co Ltd 顕微鏡系のレーザ光による比較測長装置
JPS60257164A (ja) * 1984-06-02 1985-12-18 Dainippon Screen Mfg Co Ltd プリント配線板の撮像装置
JPS6136871A (ja) * 1984-07-30 1986-02-21 Omron Tateisi Electronics Co 画像入力装置
JPS62144008A (ja) * 1985-12-18 1987-06-27 Hitachi Ltd 印刷回路板のパタ−ン検査装置
JPH02134541A (ja) * 1988-11-15 1990-05-23 Nissan Motor Co Ltd 金属組識の検査方法

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0124113B1 (en) * 1983-04-28 1989-03-01 Hitachi, Ltd. Method of detecting pattern defect and its apparatus
DE3422395A1 (de) * 1983-06-16 1985-01-17 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zum ermitteln von verdrahtungsmustern
JPS60119407A (ja) * 1983-11-30 1985-06-26 Nippon Kogaku Kk <Nikon> 比較検査装置
US4595289A (en) * 1984-01-25 1986-06-17 At&T Bell Laboratories Inspection system utilizing dark-field illumination
JPS60263807A (ja) * 1984-06-12 1985-12-27 Dainippon Screen Mfg Co Ltd プリント配線板のパタ−ン欠陥検査装置
DE3446354A1 (de) * 1984-12-19 1986-06-26 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optoelektronische vergleichsvorrichtung fuer strukturen auf ebenen oberflaechen oder fuer flaechige strukturen
US4677302A (en) * 1985-03-29 1987-06-30 Siemens Corporate Research & Support, Inc. Optical system for inspecting printed circuit boards wherein a ramp filter is disposed between reflected beam and photodetector
JPS63152315U (ja) * 1987-03-26 1988-10-06
US4949390A (en) * 1987-04-16 1990-08-14 Applied Vision Systems, Inc. Interconnect verification using serial neighborhood processors
US5131755A (en) * 1988-02-19 1992-07-21 Chadwick Curt H Automatic high speed optical inspection system
US4877326A (en) * 1988-02-19 1989-10-31 Kla Instruments Corporation Method and apparatus for optical inspection of substrates
US4957367A (en) * 1988-05-31 1990-09-18 Lev Dulman Inteferometric imaging system
US5058982A (en) * 1989-06-21 1991-10-22 Orbot Systems Ltd. Illumination system and inspection apparatus including same
JP3132565B2 (ja) * 1989-08-30 2001-02-05 株式会社日立製作所 欠陥検査方法及びその装置
US5085517A (en) * 1989-10-31 1992-02-04 Chadwick Curt H Automatic high speed optical inspection system
IL94368A (en) * 1990-05-11 1993-07-08 Orbot Systems Ltd Optic inspection apparatus and illumination system particularly useful therein
US5245421A (en) * 1990-09-19 1993-09-14 Control Automation, Incorporated Apparatus for inspecting printed circuit boards with surface mounted components
US5216485A (en) * 1991-09-04 1993-06-01 International Business Machines Corporation Advanced via inspection tool (avit)
US5220617A (en) * 1991-09-04 1993-06-15 International Business Machines Corporation Method and apparatus for object inspection
US6133534A (en) * 1991-11-29 2000-10-17 Hitachi Chemical Company, Ltd. Wiring board for electrical tests with bumps having polymeric coating
US6568073B1 (en) * 1991-11-29 2003-05-27 Hitachi Chemical Company, Ltd. Process for the fabrication of wiring board for electrical tests
JP2795044B2 (ja) * 1992-03-26 1998-09-10 住友電装株式会社 圧着端子画像処理検査における照明方法及び画像処理方法
US5392360A (en) * 1993-04-28 1995-02-21 International Business Machines Corporation Method and apparatus for inspection of matched substrate heatsink and hat assemblies
JPH06317532A (ja) * 1993-04-30 1994-11-15 Kazumi Haga 検査装置
US5532739A (en) * 1993-10-06 1996-07-02 Cognex Corporation Automated optical inspection apparatus
US5640199A (en) * 1993-10-06 1997-06-17 Cognex Corporation Automated optical inspection apparatus
US5548326A (en) * 1993-10-06 1996-08-20 Cognex Corporation Efficient image registration
JP3431247B2 (ja) * 1993-12-28 2003-07-28 株式会社日立製作所 薄膜製造方法および薄膜多層基板製造方法
US5550763A (en) * 1994-05-02 1996-08-27 Michael; David J. Using cone shaped search models to locate ball bonds on wire bonded devices
US5581632A (en) * 1994-05-02 1996-12-03 Cognex Corporation Method and apparatus for ball bond inspection system
US6061467A (en) * 1994-05-02 2000-05-09 Cognex Corporation Automated optical inspection apparatus using nearest neighbor interpolation
US5642158A (en) * 1994-05-02 1997-06-24 Cognex Corporation Method and apparatus to detect capillary indentations
JP3404134B2 (ja) * 1994-06-21 2003-05-06 株式会社ニュークリエイション 検査装置
US5841543A (en) * 1995-03-09 1998-11-24 Texas Instruments Incorporated Method and apparatus for verifying the presence of a material applied to a substrate
US6035066A (en) * 1995-06-02 2000-03-07 Cognex Corporation Boundary tracking method and apparatus to find leads
JP3797704B2 (ja) * 1996-04-05 2006-07-19 株式会社ミツトヨ 光学式測定装置
IL140248A0 (en) 1998-06-16 2002-02-10 Orbotech Ltd Illuminator for inspecting substantially flat surfaces
IL131284A (en) 1999-08-05 2003-05-29 Orbotech Ltd Illumination for inspecting surfaces of articles
JP2001255281A (ja) * 2000-01-17 2001-09-21 Agilent Technol Inc 検査装置
US6507395B1 (en) * 2000-07-11 2003-01-14 Maxsys Technologies Corporation Illumination head
KR100737758B1 (ko) * 2004-06-30 2007-07-10 아주하이텍(주) 조명장치를 구비하는 자동 광학 검사 시스템 및 그의 검사 방법
JP2006041352A (ja) * 2004-07-29 2006-02-09 Dainippon Screen Mfg Co Ltd 皮膜検査装置、検査システム、プログラム、皮膜検査方法およびプリント基板検査方法
WO2007023487A2 (en) * 2005-08-26 2007-03-01 Camtek Ltd. Device and method for controlling an angular coverage of a light beam

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514784B1 (ja) * 1971-05-17 1976-02-14
US3806252A (en) * 1972-07-10 1974-04-23 Eastman Kodak Co Hole measurer
JPS55142254A (en) * 1979-04-25 1980-11-06 Hitachi Ltd Inspecting method for pattern of printed wiring board

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984001212A1 (en) * 1982-09-20 1984-03-29 Contrex Inc Automatic semiconductor surface inspection apparatus and method
EP0119198A4 (en) * 1982-09-20 1986-07-08 Contrex Inc AUTOMATIC SEMICONDUCTOR SURFACE CONTROL DEVICE AND METHOD.
JPS5999304A (ja) * 1982-11-30 1984-06-08 Asahi Optical Co Ltd 顕微鏡系のレーザ光による比較測長装置
JPS60257164A (ja) * 1984-06-02 1985-12-18 Dainippon Screen Mfg Co Ltd プリント配線板の撮像装置
JPS6136871A (ja) * 1984-07-30 1986-02-21 Omron Tateisi Electronics Co 画像入力装置
JPS62144008A (ja) * 1985-12-18 1987-06-27 Hitachi Ltd 印刷回路板のパタ−ン検査装置
JPH02134541A (ja) * 1988-11-15 1990-05-23 Nissan Motor Co Ltd 金属組識の検査方法

Also Published As

Publication number Publication date
JPS6017044B2 (ja) 1985-04-30
US4421410A (en) 1983-12-20

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