JPS5616801A - Magnetic scale - Google Patents

Magnetic scale

Info

Publication number
JPS5616801A
JPS5616801A JP9236679A JP9236679A JPS5616801A JP S5616801 A JPS5616801 A JP S5616801A JP 9236679 A JP9236679 A JP 9236679A JP 9236679 A JP9236679 A JP 9236679A JP S5616801 A JPS5616801 A JP S5616801A
Authority
JP
Japan
Prior art keywords
magnetizing
generated
materials
photoetching
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9236679A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213244B2 (enrdf_load_html_response
Inventor
Shuhei Tsuchimoto
Tetsuo Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP9236679A priority Critical patent/JPS5616801A/ja
Publication of JPS5616801A publication Critical patent/JPS5616801A/ja
Publication of JPH0213244B2 publication Critical patent/JPH0213244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP9236679A 1979-07-19 1979-07-19 Magnetic scale Granted JPS5616801A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9236679A JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9236679A JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Publications (2)

Publication Number Publication Date
JPS5616801A true JPS5616801A (en) 1981-02-18
JPH0213244B2 JPH0213244B2 (enrdf_load_html_response) 1990-04-03

Family

ID=14052410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9236679A Granted JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Country Status (1)

Country Link
JP (1) JPS5616801A (enrdf_load_html_response)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3218298A1 (de) 1981-05-15 1982-12-23 Fuji Jukogyo K.K., Tokyo Vorrichtung zum messen einer position
JPS60170702A (ja) * 1984-02-16 1985-09-04 S G:Kk 直線位置検出装置及び該装置におけるロツド部の製造方法
JPS61173101A (ja) * 1984-12-24 1986-08-04 アルカテル　エヌ．ヴェイ． 位置センサ
JPH08152078A (ja) * 1994-11-28 1996-06-11 Ckd Corp エアーオペレートバルブ
DE102007049741A1 (de) * 2007-10-16 2009-07-02 Micromotion Gmbh Magnetischer Maßstabträger

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3218298A1 (de) 1981-05-15 1982-12-23 Fuji Jukogyo K.K., Tokyo Vorrichtung zum messen einer position
JPS60170702A (ja) * 1984-02-16 1985-09-04 S G:Kk 直線位置検出装置及び該装置におけるロツド部の製造方法
JPS61173101A (ja) * 1984-12-24 1986-08-04 アルカテル　エヌ．ヴェイ． 位置センサ
JPH08152078A (ja) * 1994-11-28 1996-06-11 Ckd Corp エアーオペレートバルブ
DE102007049741A1 (de) * 2007-10-16 2009-07-02 Micromotion Gmbh Magnetischer Maßstabträger
DE102007049741B4 (de) * 2007-10-16 2011-07-28 Micromotion GmbH, 55124 Magnetischer Maßstabträger

Also Published As

Publication number Publication date
JPH0213244B2 (enrdf_load_html_response) 1990-04-03

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