JPS56166370A - Surface coated tool member of superior abrasion resistance and corrosion resistance - Google Patents

Surface coated tool member of superior abrasion resistance and corrosion resistance

Info

Publication number
JPS56166370A
JPS56166370A JP7035580A JP7035580A JPS56166370A JP S56166370 A JPS56166370 A JP S56166370A JP 7035580 A JP7035580 A JP 7035580A JP 7035580 A JP7035580 A JP 7035580A JP S56166370 A JPS56166370 A JP S56166370A
Authority
JP
Japan
Prior art keywords
vapor
tool members
resistance
corrosion resistance
surface coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7035580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115952B2 (enrdf_load_stackoverflow
Inventor
Taijiro Sugisawa
Takeshi Itabane
Akio Nishiyama
Takeshi Abe
Shotaro Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7035580A priority Critical patent/JPS56166370A/ja
Publication of JPS56166370A publication Critical patent/JPS56166370A/ja
Publication of JPS6115952B2 publication Critical patent/JPS6115952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP7035580A 1980-05-27 1980-05-27 Surface coated tool member of superior abrasion resistance and corrosion resistance Granted JPS56166370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7035580A JPS56166370A (en) 1980-05-27 1980-05-27 Surface coated tool member of superior abrasion resistance and corrosion resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7035580A JPS56166370A (en) 1980-05-27 1980-05-27 Surface coated tool member of superior abrasion resistance and corrosion resistance

Publications (2)

Publication Number Publication Date
JPS56166370A true JPS56166370A (en) 1981-12-21
JPS6115952B2 JPS6115952B2 (enrdf_load_stackoverflow) 1986-04-26

Family

ID=13429035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7035580A Granted JPS56166370A (en) 1980-05-27 1980-05-27 Surface coated tool member of superior abrasion resistance and corrosion resistance

Country Status (1)

Country Link
JP (1) JPS56166370A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106513A (en) * 1980-12-22 1982-07-02 Nippon Telegr & Teleph Corp <Ntt> Formation of carbon film
JPS5993869A (ja) * 1982-11-19 1984-05-30 Sumitomo Electric Ind Ltd ダイヤモンドを含有する硬質層被覆構造物
JPS6094232A (ja) * 1983-10-27 1985-05-27 Mitsubishi Metal Corp 表面被覆焼結硬質合金チツプをろう付けした切削工具の製造法
JPS60114572A (ja) * 1983-11-25 1985-06-21 Mitsubishi Metal Corp 超硬質被覆層を有する超硬合金部材
JP2007083382A (ja) * 2005-08-26 2007-04-05 Sumitomo Electric Hardmetal Corp 硬質炭素被覆工具

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106513A (en) * 1980-12-22 1982-07-02 Nippon Telegr & Teleph Corp <Ntt> Formation of carbon film
JPS5993869A (ja) * 1982-11-19 1984-05-30 Sumitomo Electric Ind Ltd ダイヤモンドを含有する硬質層被覆構造物
JPS6094232A (ja) * 1983-10-27 1985-05-27 Mitsubishi Metal Corp 表面被覆焼結硬質合金チツプをろう付けした切削工具の製造法
JPS60114572A (ja) * 1983-11-25 1985-06-21 Mitsubishi Metal Corp 超硬質被覆層を有する超硬合金部材
JP2007083382A (ja) * 2005-08-26 2007-04-05 Sumitomo Electric Hardmetal Corp 硬質炭素被覆工具

Also Published As

Publication number Publication date
JPS6115952B2 (enrdf_load_stackoverflow) 1986-04-26

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