JPS56160035A - Applying device of liquid - Google Patents
Applying device of liquidInfo
- Publication number
- JPS56160035A JPS56160035A JP6360980A JP6360980A JPS56160035A JP S56160035 A JPS56160035 A JP S56160035A JP 6360980 A JP6360980 A JP 6360980A JP 6360980 A JP6360980 A JP 6360980A JP S56160035 A JPS56160035 A JP S56160035A
- Authority
- JP
- Japan
- Prior art keywords
- circumference
- air current
- water
- developer
- applying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6360980A JPS56160035A (en) | 1980-05-13 | 1980-05-13 | Applying device of liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6360980A JPS56160035A (en) | 1980-05-13 | 1980-05-13 | Applying device of liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56160035A true JPS56160035A (en) | 1981-12-09 |
Family
ID=13234199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6360980A Pending JPS56160035A (en) | 1980-05-13 | 1980-05-13 | Applying device of liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56160035A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197068A (en) * | 1981-05-28 | 1982-12-03 | Oki Electric Ind Co Ltd | Apparatus for coating resist |
JPS60110118A (ja) * | 1983-11-18 | 1985-06-15 | Toshiba Corp | レジスト塗布方法および装置 |
JPS60189937A (ja) * | 1984-03-12 | 1985-09-27 | Fujitsu Ltd | レジスト塗布装置 |
JP2004274028A (ja) * | 2003-02-20 | 2004-09-30 | Tokyo Ohka Kogyo Co Ltd | 現像装置および現像方法 |
-
1980
- 1980-05-13 JP JP6360980A patent/JPS56160035A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197068A (en) * | 1981-05-28 | 1982-12-03 | Oki Electric Ind Co Ltd | Apparatus for coating resist |
JPS60110118A (ja) * | 1983-11-18 | 1985-06-15 | Toshiba Corp | レジスト塗布方法および装置 |
JPS60189937A (ja) * | 1984-03-12 | 1985-09-27 | Fujitsu Ltd | レジスト塗布装置 |
JP2004274028A (ja) * | 2003-02-20 | 2004-09-30 | Tokyo Ohka Kogyo Co Ltd | 現像装置および現像方法 |
US6893172B2 (en) | 2003-02-20 | 2005-05-17 | Tokyo Ohka Kogyo Co., Ltd. | Developing apparatus and developing method |
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