JPS56157949A - Grinder - Google Patents
GrinderInfo
- Publication number
- JPS56157949A JPS56157949A JP5787380A JP5787380A JPS56157949A JP S56157949 A JPS56157949 A JP S56157949A JP 5787380 A JP5787380 A JP 5787380A JP 5787380 A JP5787380 A JP 5787380A JP S56157949 A JPS56157949 A JP S56157949A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- abrasive cloth
- brought
- stop
- infrared rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5787380A JPS56157949A (en) | 1980-05-02 | 1980-05-02 | Grinder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5787380A JPS56157949A (en) | 1980-05-02 | 1980-05-02 | Grinder |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56157949A true JPS56157949A (en) | 1981-12-05 |
JPS6335390B2 JPS6335390B2 (ja) | 1988-07-14 |
Family
ID=13068095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5787380A Granted JPS56157949A (en) | 1980-05-02 | 1980-05-02 | Grinder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56157949A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265262A (ja) * | 1985-05-17 | 1986-11-25 | Hitachi Ltd | 研磨装置 |
EP0616362A2 (en) * | 1993-03-15 | 1994-09-21 | Kabushiki Kaisha Toshiba | Method for polishing work piece and apparatus therefor |
WO1997032690A1 (fr) * | 1996-03-04 | 1997-09-12 | Teikoku Denso Co., Ltd. | Procede et appareil pour le polissage d'un disque de resine |
JP2002231672A (ja) * | 2001-01-31 | 2002-08-16 | Mitsubishi Materials Silicon Corp | ウェーハ研磨方法およびその装置 |
JP2013022664A (ja) * | 2011-07-19 | 2013-02-04 | Ebara Corp | 研磨装置および方法 |
CN103273413A (zh) * | 2013-04-09 | 2013-09-04 | 上海华力微电子有限公司 | 化学机械研磨装置 |
CN108818076A (zh) * | 2018-07-13 | 2018-11-16 | 湖南文理学院 | 一种自定位式汽车零部件加工设备 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI548483B (zh) | 2011-07-19 | 2016-09-11 | 荏原製作所股份有限公司 | 研磨裝置及方法 |
-
1980
- 1980-05-02 JP JP5787380A patent/JPS56157949A/ja active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265262A (ja) * | 1985-05-17 | 1986-11-25 | Hitachi Ltd | 研磨装置 |
EP0616362A2 (en) * | 1993-03-15 | 1994-09-21 | Kabushiki Kaisha Toshiba | Method for polishing work piece and apparatus therefor |
WO1997032690A1 (fr) * | 1996-03-04 | 1997-09-12 | Teikoku Denso Co., Ltd. | Procede et appareil pour le polissage d'un disque de resine |
WO1997032691A1 (fr) * | 1996-03-04 | 1997-09-12 | Teikoku Denso Co., Ltd. | Procede de polissage d'un disque dur et appareil de polissage prevu a cet effet |
US6116987A (en) * | 1996-03-04 | 2000-09-12 | Kubo; Yuzo | Method of polishing hard disc and polishing apparatus therefor |
JP2002231672A (ja) * | 2001-01-31 | 2002-08-16 | Mitsubishi Materials Silicon Corp | ウェーハ研磨方法およびその装置 |
JP2013022664A (ja) * | 2011-07-19 | 2013-02-04 | Ebara Corp | 研磨装置および方法 |
CN103273413A (zh) * | 2013-04-09 | 2013-09-04 | 上海华力微电子有限公司 | 化学机械研磨装置 |
CN108818076A (zh) * | 2018-07-13 | 2018-11-16 | 湖南文理学院 | 一种自定位式汽车零部件加工设备 |
Also Published As
Publication number | Publication date |
---|---|
JPS6335390B2 (ja) | 1988-07-14 |
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