JPS56155945A - Electrophotographic receptor - Google Patents

Electrophotographic receptor

Info

Publication number
JPS56155945A
JPS56155945A JP4806080A JP4806080A JPS56155945A JP S56155945 A JPS56155945 A JP S56155945A JP 4806080 A JP4806080 A JP 4806080A JP 4806080 A JP4806080 A JP 4806080A JP S56155945 A JPS56155945 A JP S56155945A
Authority
JP
Japan
Prior art keywords
layer
substrate
receptor
electrically conductive
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4806080A
Other languages
Japanese (ja)
Inventor
Yukio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4806080A priority Critical patent/JPS56155945A/en
Publication of JPS56155945A publication Critical patent/JPS56155945A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08221—Silicon-based comprising one or two silicon based layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To obtain the titled receptor having superior charge retentivity, photosensitivity, wear resistance and a long life by forming an amorphous silicon hydride layer and a crystalline silicon layer on an electrically conductive substrate. CONSTITUTION:Electrically conductive substrate 1 is set on the substrate holding electrode of a high frequency sputtering apparatus, and after evacuating the sputtering chamber gaseous Ar contg. 10vol% silane (SiH4) is introduced to keep the pressure of the gas in the chamber at 0.01-2 Torr. While keeping the temp. of substrate 1 at 200-300 deg.C, high frequency discharge is caused to form amorphous silicon hydride layer 2 having 3-50mum thickness on substrate 1, and on layer 2 crystalline silicon layer 3 having 1-5mum thickness is formed to obtain a receptor having electrophotographic characteristics such as high photosensitivity of S = 3.2lux.sec and a sensitive region extending to longer wavelengths (400-800nm).
JP4806080A 1980-04-14 1980-04-14 Electrophotographic receptor Pending JPS56155945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4806080A JPS56155945A (en) 1980-04-14 1980-04-14 Electrophotographic receptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4806080A JPS56155945A (en) 1980-04-14 1980-04-14 Electrophotographic receptor

Publications (1)

Publication Number Publication Date
JPS56155945A true JPS56155945A (en) 1981-12-02

Family

ID=12792795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4806080A Pending JPS56155945A (en) 1980-04-14 1980-04-14 Electrophotographic receptor

Country Status (1)

Country Link
JP (1) JPS56155945A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066812A2 (en) * 1981-05-29 1982-12-15 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066812A2 (en) * 1981-05-29 1982-12-15 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member
US4560634A (en) * 1981-05-29 1985-12-24 Tokyo Shibaura Denki Kabushiki Kaisha Electrophotographic photosensitive member using microcrystalline silicon

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