JPS5614933A - Sample inspecting device - Google Patents
Sample inspecting deviceInfo
- Publication number
- JPS5614933A JPS5614933A JP9038879A JP9038879A JPS5614933A JP S5614933 A JPS5614933 A JP S5614933A JP 9038879 A JP9038879 A JP 9038879A JP 9038879 A JP9038879 A JP 9038879A JP S5614933 A JPS5614933 A JP S5614933A
- Authority
- JP
- Japan
- Prior art keywords
- light
- sample
- valve
- dust
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9038879A JPS5614933A (en) | 1979-07-18 | 1979-07-18 | Sample inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9038879A JPS5614933A (en) | 1979-07-18 | 1979-07-18 | Sample inspecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5614933A true JPS5614933A (en) | 1981-02-13 |
Family
ID=13997187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9038879A Pending JPS5614933A (en) | 1979-07-18 | 1979-07-18 | Sample inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5614933A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585636A (ja) * | 1981-06-30 | 1983-01-13 | Fujitsu Ltd | 被検査物の検査方法 |
US4447152A (en) * | 1981-12-24 | 1984-05-08 | Ibm Corp. | Method and apparatus for detecting defects in apertured plates |
JPH0482362U (ja) * | 1990-11-29 | 1992-07-17 |
-
1979
- 1979-07-18 JP JP9038879A patent/JPS5614933A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585636A (ja) * | 1981-06-30 | 1983-01-13 | Fujitsu Ltd | 被検査物の検査方法 |
US4447152A (en) * | 1981-12-24 | 1984-05-08 | Ibm Corp. | Method and apparatus for detecting defects in apertured plates |
JPH0482362U (ja) * | 1990-11-29 | 1992-07-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57109235A (en) | Sealing work | |
JPS5614933A (en) | Sample inspecting device | |
GB829864A (en) | Improvements in or relating to automatic dew-point detecting apparatus | |
ATE35577T1 (de) | Roentgenstrahlenerreger. | |
JPS5216178A (en) | Airtightness testing device | |
SE7908213L (sv) | Elektronsvetsforfarande under hogre tryck av 10 mbar och derover samt anordning for utforande av forfarandet | |
JPS6461653A (en) | Method and device for detecting crack of translucent body | |
JPS576310A (en) | Method and apparatus for measuring film thickness | |
ES528949A0 (es) | Un dispositivo detector de fugas de gas desde un recinto que lo contiene, y metodo correspondiente | |
JPS5764153A (en) | Bottle inspecting device | |
JPS5779436A (en) | Multiitem spectrochemical analytical device | |
JPS5756109A (en) | Descaing method for hot strip | |
JPS542700A (en) | Optical fire detector | |
JPS545785A (en) | Non-destructive inspecting apparatus | |
JPS5762872A (en) | Method and device for monitoring welding in gas shielded arc welding | |
JPS5414011A (en) | Blower | |
JPS51147383A (en) | Gas sampling device for an analysis device | |
JPS57206045A (en) | Method for checking silicon wafer | |
JPS5255864A (en) | Dry etching device | |
JPS53125695A (en) | Exposing method for electron rays | |
ES8104877A1 (es) | Procedimiento y dispositivo para medir la absorcion de radiacion laser | |
JPS57187676A (en) | Measuring device for distance | |
JPS542054A (en) | Test piece holder quickly confirmable for electron beam location | |
JPS52121602A (en) | Method and apparatus for finding dying of fire in coke oven | |
JPS6426182A (en) | Intensity monitor for exposure of x rays |