JPS5614933A - Sample inspecting device - Google Patents

Sample inspecting device

Info

Publication number
JPS5614933A
JPS5614933A JP9038879A JP9038879A JPS5614933A JP S5614933 A JPS5614933 A JP S5614933A JP 9038879 A JP9038879 A JP 9038879A JP 9038879 A JP9038879 A JP 9038879A JP S5614933 A JPS5614933 A JP S5614933A
Authority
JP
Japan
Prior art keywords
light
sample
valve
dust
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9038879A
Other languages
English (en)
Inventor
Kazumitsu Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9038879A priority Critical patent/JPS5614933A/ja
Publication of JPS5614933A publication Critical patent/JPS5614933A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP9038879A 1979-07-18 1979-07-18 Sample inspecting device Pending JPS5614933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9038879A JPS5614933A (en) 1979-07-18 1979-07-18 Sample inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9038879A JPS5614933A (en) 1979-07-18 1979-07-18 Sample inspecting device

Publications (1)

Publication Number Publication Date
JPS5614933A true JPS5614933A (en) 1981-02-13

Family

ID=13997187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9038879A Pending JPS5614933A (en) 1979-07-18 1979-07-18 Sample inspecting device

Country Status (1)

Country Link
JP (1) JPS5614933A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585636A (ja) * 1981-06-30 1983-01-13 Fujitsu Ltd 被検査物の検査方法
US4447152A (en) * 1981-12-24 1984-05-08 Ibm Corp. Method and apparatus for detecting defects in apertured plates
JPH0482362U (ja) * 1990-11-29 1992-07-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585636A (ja) * 1981-06-30 1983-01-13 Fujitsu Ltd 被検査物の検査方法
US4447152A (en) * 1981-12-24 1984-05-08 Ibm Corp. Method and apparatus for detecting defects in apertured plates
JPH0482362U (ja) * 1990-11-29 1992-07-17

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