JPS56138205A - Displacement measuring equipment - Google Patents

Displacement measuring equipment

Info

Publication number
JPS56138205A
JPS56138205A JP4272180A JP4272180A JPS56138205A JP S56138205 A JPS56138205 A JP S56138205A JP 4272180 A JP4272180 A JP 4272180A JP 4272180 A JP4272180 A JP 4272180A JP S56138205 A JPS56138205 A JP S56138205A
Authority
JP
Japan
Prior art keywords
image
displacement
rotation
light beam
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4272180A
Other languages
Japanese (ja)
Inventor
Kenji Matsumaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP4272180A priority Critical patent/JPS56138205A/en
Publication of JPS56138205A publication Critical patent/JPS56138205A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Abstract

PURPOSE:To make it possible to measure displacement of the surface by use of a regular photodetecting element, by making a light beam irradiate the surface of an object, forming an image by the reflected ray, and detecting the displacement of the image, which is accompanied by that of the surface, by means of a regularly rotating douser. CONSTITUTION:An image Q is formed by a reflected ray of the light spot which is formed by making a light beam irradiate an object to be measured A. A dousing disk 18 which has a slit 17 and rotates at a constant speed is provided so as to conform with a moving locus of the image Q. The photodetector 21 detects a light beam of the image Q which moves through the slit 17, and a reference light beam is detected by the photodetector 24. In this constitution, a rotation reference position signal is output by the reference position signal generating circuit 25. A detection signal of the moving image Q is output from the output of the photodetector 21. As for both these signals, count signals corresponding to the angle of rotation of the image Q are output by the rotation angle detection circuit 24. Since displacement of the image Q is in porportion to the angle of rotation, displacement of the image Q, namely, displacement of the surface of an object can be grasped by knowing the angle of rotation. In this way, displacement can be measured by use of a regular photodetecting element.
JP4272180A 1980-03-31 1980-03-31 Displacement measuring equipment Pending JPS56138205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4272180A JPS56138205A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4272180A JPS56138205A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Publications (1)

Publication Number Publication Date
JPS56138205A true JPS56138205A (en) 1981-10-28

Family

ID=12643924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4272180A Pending JPS56138205A (en) 1980-03-31 1980-03-31 Displacement measuring equipment

Country Status (1)

Country Link
JP (1) JPS56138205A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325315U (en) * 1986-08-04 1988-02-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325315U (en) * 1986-08-04 1988-02-19

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