JPS56136647A - Multiple filament ion source - Google Patents

Multiple filament ion source

Info

Publication number
JPS56136647A
JPS56136647A JP2851281A JP2851281A JPS56136647A JP S56136647 A JPS56136647 A JP S56136647A JP 2851281 A JP2851281 A JP 2851281A JP 2851281 A JP2851281 A JP 2851281A JP S56136647 A JPS56136647 A JP S56136647A
Authority
JP
Japan
Prior art keywords
ion source
multiple filament
filament ion
source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2851281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6357104B2 (enrdf_load_stackoverflow
Inventor
Richiyaado Karubufu Chiyaaruzu
Reonarudo Taanaa Nooman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS56136647A publication Critical patent/JPS56136647A/ja
Publication of JPS6357104B2 publication Critical patent/JPS6357104B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2851281A 1980-03-03 1981-03-02 Multiple filament ion source Granted JPS56136647A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12622580A 1980-03-03 1980-03-03

Publications (2)

Publication Number Publication Date
JPS56136647A true JPS56136647A (en) 1981-10-26
JPS6357104B2 JPS6357104B2 (enrdf_load_stackoverflow) 1988-11-10

Family

ID=22423688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2851281A Granted JPS56136647A (en) 1980-03-03 1981-03-02 Multiple filament ion source

Country Status (3)

Country Link
JP (1) JPS56136647A (enrdf_load_stackoverflow)
CH (1) CH650104A5 (enrdf_load_stackoverflow)
GB (1) GB2070853B (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4847504A (en) * 1983-08-15 1989-07-11 Applied Materials, Inc. Apparatus and methods for ion implantation
EP1675154A3 (en) * 1999-12-13 2009-07-15 SemEquip, Inc. Ion implantation ion source
USD525412S1 (en) * 2004-11-12 2006-07-25 Henri-Lloyd Limited T-shirt
US9401266B2 (en) * 2014-07-25 2016-07-26 Bruker Daltonics, Inc. Filament for mass spectrometric electron impact ion source
JP7093506B2 (ja) * 2016-11-11 2022-06-30 日新イオン機器株式会社 イオン源及びイオン注入機

Also Published As

Publication number Publication date
JPS6357104B2 (enrdf_load_stackoverflow) 1988-11-10
CH650104A5 (de) 1985-06-28
GB2070853B (en) 1984-01-18
GB2070853A (en) 1981-09-09

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