JPS57113547A - Electron ion source - Google Patents
Electron ion sourceInfo
- Publication number
- JPS57113547A JPS57113547A JP17662680A JP17662680A JPS57113547A JP S57113547 A JPS57113547 A JP S57113547A JP 17662680 A JP17662680 A JP 17662680A JP 17662680 A JP17662680 A JP 17662680A JP S57113547 A JPS57113547 A JP S57113547A
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- electron ion
- electron
- source
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17662680A JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17662680A JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57113547A true JPS57113547A (en) | 1982-07-15 |
JPS631699B2 JPS631699B2 (en) | 1988-01-13 |
Family
ID=16016862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17662680A Granted JPS57113547A (en) | 1980-12-16 | 1980-12-16 | Electron ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57113547A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182640A (en) * | 1984-02-29 | 1985-09-18 | Toshiba Corp | Ion source device |
-
1980
- 1980-12-16 JP JP17662680A patent/JPS57113547A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182640A (en) * | 1984-02-29 | 1985-09-18 | Toshiba Corp | Ion source device |
JPH0468731B2 (en) * | 1984-02-29 | 1992-11-04 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS631699B2 (en) | 1988-01-13 |
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