JPS57113547A - Electron ion source - Google Patents

Electron ion source

Info

Publication number
JPS57113547A
JPS57113547A JP17662680A JP17662680A JPS57113547A JP S57113547 A JPS57113547 A JP S57113547A JP 17662680 A JP17662680 A JP 17662680A JP 17662680 A JP17662680 A JP 17662680A JP S57113547 A JPS57113547 A JP S57113547A
Authority
JP
Japan
Prior art keywords
ion source
electron ion
electron
source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17662680A
Other languages
Japanese (ja)
Other versions
JPS631699B2 (en
Inventor
Efuimoobitsuchi Kureind Yuurii
Arekuseebitsuchi Gu Urajimiiru
Iwanoobitsuchi Beruyuu Serugei
Washiriiebitsuchi Gabu Serugei
Petoroobitsuchi Koo Urajimiiru
Fuedoroobitsuchi Dey Anatoorii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP17662680A priority Critical patent/JPS57113547A/en
Publication of JPS57113547A publication Critical patent/JPS57113547A/en
Publication of JPS631699B2 publication Critical patent/JPS631699B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17662680A 1980-12-16 1980-12-16 Electron ion source Granted JPS57113547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17662680A JPS57113547A (en) 1980-12-16 1980-12-16 Electron ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17662680A JPS57113547A (en) 1980-12-16 1980-12-16 Electron ion source

Publications (2)

Publication Number Publication Date
JPS57113547A true JPS57113547A (en) 1982-07-15
JPS631699B2 JPS631699B2 (en) 1988-01-13

Family

ID=16016862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17662680A Granted JPS57113547A (en) 1980-12-16 1980-12-16 Electron ion source

Country Status (1)

Country Link
JP (1) JPS57113547A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182640A (en) * 1984-02-29 1985-09-18 Toshiba Corp Ion source device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182640A (en) * 1984-02-29 1985-09-18 Toshiba Corp Ion source device
JPH0468731B2 (en) * 1984-02-29 1992-11-04 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS631699B2 (en) 1988-01-13

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