JPS57132654A - Gas ion source - Google Patents
Gas ion sourceInfo
- Publication number
- JPS57132654A JPS57132654A JP56194648A JP19464881A JPS57132654A JP S57132654 A JPS57132654 A JP S57132654A JP 56194648 A JP56194648 A JP 56194648A JP 19464881 A JP19464881 A JP 19464881A JP S57132654 A JPS57132654 A JP S57132654A
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- gas ion
- gas
- source
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
- H01J2237/0807—Gas field ion sources [GFIS]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8038922 | 1980-12-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57132654A true JPS57132654A (en) | 1982-08-17 |
Family
ID=10517754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56194648A Pending JPS57132654A (en) | 1980-12-04 | 1981-12-04 | Gas ion source |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0056899A1 (en) |
JP (1) | JPS57132654A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007227381A (en) * | 2006-02-22 | 2007-09-06 | Fei Co | Particle optical device equipped with gas ion source |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57174467A (en) * | 1981-04-20 | 1982-10-27 | Inoue Japax Res Inc | Ion working device |
US4926056A (en) * | 1988-06-10 | 1990-05-15 | Sri International | Microelectronic field ionizer and method of fabricating the same |
US9941094B1 (en) | 2017-02-01 | 2018-04-10 | Fei Company | Innovative source assembly for ion beam production |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3309873A (en) * | 1964-08-31 | 1967-03-21 | Electro Optical Systems Inc | Plasma accelerator using hall currents |
US3955090A (en) * | 1973-12-27 | 1976-05-04 | Exxon Nuclear Company, Inc. | Sputtered particle flow source for isotopically selective ionization |
DE2610165C2 (en) * | 1976-03-11 | 1983-11-10 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Duoplasmatron ion source for generating multiply charged ions |
DE2701395C3 (en) * | 1977-01-14 | 1979-12-06 | Dr. Franzen Analysentechnik Gmbh & Co Kg, 2800 Bremen | Ion source for the chemical ionization of atoms and molecules |
-
1981
- 1981-12-02 EP EP19810305685 patent/EP0056899A1/en not_active Ceased
- 1981-12-04 JP JP56194648A patent/JPS57132654A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007227381A (en) * | 2006-02-22 | 2007-09-06 | Fei Co | Particle optical device equipped with gas ion source |
Also Published As
Publication number | Publication date |
---|---|
EP0056899A1 (en) | 1982-08-04 |
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