GB2070853B - Parallel-connected cathode segment arrangement for a hot cathode electron impact ion source - Google Patents

Parallel-connected cathode segment arrangement for a hot cathode electron impact ion source

Info

Publication number
GB2070853B
GB2070853B GB8106094A GB8106094A GB2070853B GB 2070853 B GB2070853 B GB 2070853B GB 8106094 A GB8106094 A GB 8106094A GB 8106094 A GB8106094 A GB 8106094A GB 2070853 B GB2070853 B GB 2070853B
Authority
GB
United Kingdom
Prior art keywords
parallel
ion source
electron impact
segment arrangement
impact ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8106094A
Other languages
English (en)
Other versions
GB2070853A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB2070853A publication Critical patent/GB2070853A/en
Application granted granted Critical
Publication of GB2070853B publication Critical patent/GB2070853B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB8106094A 1980-03-03 1981-02-26 Parallel-connected cathode segment arrangement for a hot cathode electron impact ion source Expired GB2070853B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12622580A 1980-03-03 1980-03-03

Publications (2)

Publication Number Publication Date
GB2070853A GB2070853A (en) 1981-09-09
GB2070853B true GB2070853B (en) 1984-01-18

Family

ID=22423688

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8106094A Expired GB2070853B (en) 1980-03-03 1981-02-26 Parallel-connected cathode segment arrangement for a hot cathode electron impact ion source

Country Status (3)

Country Link
JP (1) JPS56136647A (enrdf_load_stackoverflow)
CH (1) CH650104A5 (enrdf_load_stackoverflow)
GB (1) GB2070853B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD525412S1 (en) * 2004-11-12 2006-07-25 Henri-Lloyd Limited T-shirt

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4847504A (en) * 1983-08-15 1989-07-11 Applied Materials, Inc. Apparatus and methods for ion implantation
EP1675154A3 (en) * 1999-12-13 2009-07-15 SemEquip, Inc. Ion implantation ion source
US9401266B2 (en) * 2014-07-25 2016-07-26 Bruker Daltonics, Inc. Filament for mass spectrometric electron impact ion source
JP7093506B2 (ja) * 2016-11-11 2022-06-30 日新イオン機器株式会社 イオン源及びイオン注入機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD525412S1 (en) * 2004-11-12 2006-07-25 Henri-Lloyd Limited T-shirt

Also Published As

Publication number Publication date
JPS6357104B2 (enrdf_load_stackoverflow) 1988-11-10
CH650104A5 (de) 1985-06-28
JPS56136647A (en) 1981-10-26
GB2070853A (en) 1981-09-09

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19970226