JPS56135926A - Cell for source of molecular beam - Google Patents

Cell for source of molecular beam

Info

Publication number
JPS56135926A
JPS56135926A JP3928780A JP3928780A JPS56135926A JP S56135926 A JPS56135926 A JP S56135926A JP 3928780 A JP3928780 A JP 3928780A JP 3928780 A JP3928780 A JP 3928780A JP S56135926 A JPS56135926 A JP S56135926A
Authority
JP
Japan
Prior art keywords
molecular
cell
source
beams
molecular beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3928780A
Other languages
Japanese (ja)
Other versions
JPS58175B2 (en
Inventor
Sukehisa Hiyamizu
Junji Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55039287A priority Critical patent/JPS58175B2/en
Publication of JPS56135926A publication Critical patent/JPS56135926A/en
Publication of JPS58175B2 publication Critical patent/JPS58175B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To generate molecular beams having high efficiency and excellent uniformity by providing a molecular-beam diffusing body inside the cell for the source of molecular beams and near the molecular-beam jetting-out port. CONSTITUTION:The stick-shaped molecular-beam diffusing body 6 is provided inside the cell 1 for the source of molecular beams formed of graphite of high purity or the like and having the molecular-beam jetting-out port 1a with a diameter (d) and the cell is covered with a heater, while a thermocouple 4 is arranged. By this constitution, the molecular beams are made to reach a substrate in a more uniform manner and thereby the distribution of thickness of a formed film turns uniform. In addition, since a large distance between the substrate and the cell becomes unnecessary, the epitaxy of the molecular beams of high efficiency becomes possible.
JP55039287A 1980-03-27 1980-03-27 Cell for molecular beam source Expired JPS58175B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55039287A JPS58175B2 (en) 1980-03-27 1980-03-27 Cell for molecular beam source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55039287A JPS58175B2 (en) 1980-03-27 1980-03-27 Cell for molecular beam source

Publications (2)

Publication Number Publication Date
JPS56135926A true JPS56135926A (en) 1981-10-23
JPS58175B2 JPS58175B2 (en) 1983-01-05

Family

ID=12548935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55039287A Expired JPS58175B2 (en) 1980-03-27 1980-03-27 Cell for molecular beam source

Country Status (1)

Country Link
JP (1) JPS58175B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140766U (en) * 1976-04-20 1977-10-25
JPS54162454A (en) * 1978-06-14 1979-12-24 Fujitsu Ltd Molecular beam generating unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140766U (en) * 1976-04-20 1977-10-25
JPS54162454A (en) * 1978-06-14 1979-12-24 Fujitsu Ltd Molecular beam generating unit

Also Published As

Publication number Publication date
JPS58175B2 (en) 1983-01-05

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