JPS56134461A - Electron ray system - Google Patents

Electron ray system

Info

Publication number
JPS56134461A
JPS56134461A JP3841780A JP3841780A JPS56134461A JP S56134461 A JPS56134461 A JP S56134461A JP 3841780 A JP3841780 A JP 3841780A JP 3841780 A JP3841780 A JP 3841780A JP S56134461 A JPS56134461 A JP S56134461A
Authority
JP
Japan
Prior art keywords
emitter
supplied
output
flushing
dividing circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3841780A
Other languages
Japanese (ja)
Other versions
JPS6010418B2 (en
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3841780A priority Critical patent/JPS6010418B2/en
Publication of JPS56134461A publication Critical patent/JPS56134461A/en
Publication of JPS6010418B2 publication Critical patent/JPS6010418B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make an emitter to be automatically subjected to strong flushing by automatically detecting the deterioration of the emitter, and making a timing signal for flushing to be produced. CONSTITUTION:A switch circuit 21 is usually opened, and any electric power is not supplied from a heat power-source 22 to an emitter 1. Signals proportional to probe currents are supplied to a divider 11 through amplifiers 10 and 15, while a signal representing the current of full discharged electrons is supplied to the divider 11 from the emitter 1. The output of the dividing circuit, together with the output of a function generator 18, is applied to a dividing circuit 16 as an input. When the output of the dividing circuit 16, which is supplied to a comparator 19, becomes below a standard voltage supplied from a reference power source 20, the comparator 19 sends a signal which works for subjecting the emitter 1 deteriorated to strong flushing. As a result, the switch circuit 21 is closed, and the emitter undergoes strong flushing by the heat current supplied from the heat power source 22.
JP3841780A 1980-03-26 1980-03-26 electron beam equipment Expired JPS6010418B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3841780A JPS6010418B2 (en) 1980-03-26 1980-03-26 electron beam equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3841780A JPS6010418B2 (en) 1980-03-26 1980-03-26 electron beam equipment

Publications (2)

Publication Number Publication Date
JPS56134461A true JPS56134461A (en) 1981-10-21
JPS6010418B2 JPS6010418B2 (en) 1985-03-16

Family

ID=12524727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3841780A Expired JPS6010418B2 (en) 1980-03-26 1980-03-26 electron beam equipment

Country Status (1)

Country Link
JP (1) JPS6010418B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5111053A (en) * 1990-02-19 1992-05-05 Seiko Instruments, Inc. Controlling a liquid metal ion source by analog feedback and digital CPU control

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5111053A (en) * 1990-02-19 1992-05-05 Seiko Instruments, Inc. Controlling a liquid metal ion source by analog feedback and digital CPU control

Also Published As

Publication number Publication date
JPS6010418B2 (en) 1985-03-16

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