JPS56130967A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS56130967A
JPS56130967A JP3333780A JP3333780A JPS56130967A JP S56130967 A JPS56130967 A JP S56130967A JP 3333780 A JP3333780 A JP 3333780A JP 3333780 A JP3333780 A JP 3333780A JP S56130967 A JPS56130967 A JP S56130967A
Authority
JP
Japan
Prior art keywords
layer
emitter
base
region
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3333780A
Other languages
English (en)
Inventor
Yuji Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3333780A priority Critical patent/JPS56130967A/ja
Publication of JPS56130967A publication Critical patent/JPS56130967A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
JP3333780A 1980-03-18 1980-03-18 Manufacture of semiconductor device Pending JPS56130967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3333780A JPS56130967A (en) 1980-03-18 1980-03-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3333780A JPS56130967A (en) 1980-03-18 1980-03-18 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS56130967A true JPS56130967A (en) 1981-10-14

Family

ID=12383745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3333780A Pending JPS56130967A (en) 1980-03-18 1980-03-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56130967A (ja)

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