JPS56129844A - Method and apparatus for inspecting color filter - Google Patents

Method and apparatus for inspecting color filter

Info

Publication number
JPS56129844A
JPS56129844A JP3299380A JP3299380A JPS56129844A JP S56129844 A JPS56129844 A JP S56129844A JP 3299380 A JP3299380 A JP 3299380A JP 3299380 A JP3299380 A JP 3299380A JP S56129844 A JPS56129844 A JP S56129844A
Authority
JP
Japan
Prior art keywords
color filter
color
stripe
region
permeates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3299380A
Other languages
English (en)
Inventor
Toshio Sekiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP3299380A priority Critical patent/JPS56129844A/ja
Publication of JPS56129844A publication Critical patent/JPS56129844A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3299380A 1980-03-14 1980-03-14 Method and apparatus for inspecting color filter Pending JPS56129844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3299380A JPS56129844A (en) 1980-03-14 1980-03-14 Method and apparatus for inspecting color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3299380A JPS56129844A (en) 1980-03-14 1980-03-14 Method and apparatus for inspecting color filter

Publications (1)

Publication Number Publication Date
JPS56129844A true JPS56129844A (en) 1981-10-12

Family

ID=12374372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3299380A Pending JPS56129844A (en) 1980-03-14 1980-03-14 Method and apparatus for inspecting color filter

Country Status (1)

Country Link
JP (1) JPS56129844A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5773173A (en) * 1995-06-16 1998-06-30 International Business Machines Corporation Film thickness inspection method and apparatus
JP2004085348A (ja) * 2002-08-27 2004-03-18 Dainippon Printing Co Ltd ３色パターンの検査装置および方法
US7643141B2 (en) * 2004-07-30 2010-01-05 Sharp Kabushiki Kaisha Method and apparatus for inspecting color filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999066A (ja) * 1973-01-26 1974-09-19
JPS5238887A (en) * 1975-09-23 1977-03-25 Agency Of Ind Science & Technol Apparatus for inspection of pattern defects

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999066A (ja) * 1973-01-26 1974-09-19
JPS5238887A (en) * 1975-09-23 1977-03-25 Agency Of Ind Science & Technol Apparatus for inspection of pattern defects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5773173A (en) * 1995-06-16 1998-06-30 International Business Machines Corporation Film thickness inspection method and apparatus
JP2004085348A (ja) * 2002-08-27 2004-03-18 Dainippon Printing Co Ltd ３色パターンの検査装置および方法
US7643141B2 (en) * 2004-07-30 2010-01-05 Sharp Kabushiki Kaisha Method and apparatus for inspecting color filter

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