JPS56126917A - Diffusing method for impurity to compound semiconductor - Google Patents
Diffusing method for impurity to compound semiconductorInfo
- Publication number
- JPS56126917A JPS56126917A JP3125080A JP3125080A JPS56126917A JP S56126917 A JPS56126917 A JP S56126917A JP 3125080 A JP3125080 A JP 3125080A JP 3125080 A JP3125080 A JP 3125080A JP S56126917 A JPS56126917 A JP S56126917A
- Authority
- JP
- Japan
- Prior art keywords
- zn2p3
- pressure
- gaas1
- xpx
- diffused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 2
- 150000001875 compounds Chemical class 0.000 title 1
- 239000012535 impurity Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000000354 decomposition reaction Methods 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 3
- 239000003708 ampul Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000007792 gaseous phase Substances 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 238000000197 pyrolysis Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
- H01L21/2233—Diffusion into or out of AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3125080A JPS56126917A (en) | 1980-03-12 | 1980-03-12 | Diffusing method for impurity to compound semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3125080A JPS56126917A (en) | 1980-03-12 | 1980-03-12 | Diffusing method for impurity to compound semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56126917A true JPS56126917A (en) | 1981-10-05 |
| JPS6145374B2 JPS6145374B2 (enrdf_load_stackoverflow) | 1986-10-07 |
Family
ID=12326112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3125080A Granted JPS56126917A (en) | 1980-03-12 | 1980-03-12 | Diffusing method for impurity to compound semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56126917A (enrdf_load_stackoverflow) |
-
1980
- 1980-03-12 JP JP3125080A patent/JPS56126917A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6145374B2 (enrdf_load_stackoverflow) | 1986-10-07 |
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