JPS56126703A - Detecting method for position and device therefor - Google Patents

Detecting method for position and device therefor

Info

Publication number
JPS56126703A
JPS56126703A JP2999980A JP2999980A JPS56126703A JP S56126703 A JPS56126703 A JP S56126703A JP 2999980 A JP2999980 A JP 2999980A JP 2999980 A JP2999980 A JP 2999980A JP S56126703 A JPS56126703 A JP S56126703A
Authority
JP
Japan
Prior art keywords
circuit
scanner
pattern
weighting
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2999980A
Other languages
Japanese (ja)
Inventor
Sadaaki Yokoi
Koichi Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2999980A priority Critical patent/JPS56126703A/en
Publication of JPS56126703A publication Critical patent/JPS56126703A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To improve the precision of positioning by detecting a position based on the distribution of outputs prepared by finding and weighting the spatial correlations between a binarized image obtained through the intermediary of a photoelectric transducing scanner and a memorized standard pattern in every divided small section. CONSTITUTION:A binarized image signal of each divided minute section 3... of the standard pattern 2, obtained by the photoelectric transducing scanner 13, is stored in a standard-pattern memorizing circuit 17. This content of memory is impressed on correlation circuits 20... through a gate circuit 18 for the standard pattern opened through the intermediary of a control circuit 24 and is correlated with the binarized image in every minute section of an object, obtained by the scanner 13, through a gate circuit 19 for a positioned pattern of the object. And, a correlation signal being compared with a prescribed threshold value by comparison circuits 21..., binary assignment of logics ''0'' and ''1'', weighting is made thereto in weighting circuits 22, coincidence of coordinates is judged from the correlative relations of two patterns based on the distribution of outputs by an addition circuit 23, thereby a coordinate detection signal is generated from a positioning circuit 26 without two patterns being overlapped, and thus the precision of positioning is improved.
JP2999980A 1980-03-10 1980-03-10 Detecting method for position and device therefor Pending JPS56126703A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2999980A JPS56126703A (en) 1980-03-10 1980-03-10 Detecting method for position and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2999980A JPS56126703A (en) 1980-03-10 1980-03-10 Detecting method for position and device therefor

Publications (1)

Publication Number Publication Date
JPS56126703A true JPS56126703A (en) 1981-10-05

Family

ID=12291612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2999980A Pending JPS56126703A (en) 1980-03-10 1980-03-10 Detecting method for position and device therefor

Country Status (1)

Country Link
JP (1) JPS56126703A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152907A (en) * 1984-01-20 1985-08-12 Anritsu Corp Misalignment detector of shape or alingment of body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152907A (en) * 1984-01-20 1985-08-12 Anritsu Corp Misalignment detector of shape or alingment of body
JPH041847B2 (en) * 1984-01-20 1992-01-14 Anritsu Corp

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