JPS56118646A - Flaw inspecting apparatus - Google Patents

Flaw inspecting apparatus

Info

Publication number
JPS56118646A
JPS56118646A JP2155880A JP2155880A JPS56118646A JP S56118646 A JPS56118646 A JP S56118646A JP 2155880 A JP2155880 A JP 2155880A JP 2155880 A JP2155880 A JP 2155880A JP S56118646 A JPS56118646 A JP S56118646A
Authority
JP
Japan
Prior art keywords
photoelectric tubes
irregularly reflected
reflected rays
flaw
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2155880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228815B2 (en, 2012
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2155880A priority Critical patent/JPS56118646A/ja
Publication of JPS56118646A publication Critical patent/JPS56118646A/ja
Publication of JPH0228815B2 publication Critical patent/JPH0228815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2155880A 1980-02-25 1980-02-25 Flaw inspecting apparatus Granted JPS56118646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2155880A JPS56118646A (en) 1980-02-25 1980-02-25 Flaw inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2155880A JPS56118646A (en) 1980-02-25 1980-02-25 Flaw inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS56118646A true JPS56118646A (en) 1981-09-17
JPH0228815B2 JPH0228815B2 (en, 2012) 1990-06-26

Family

ID=12058329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2155880A Granted JPS56118646A (en) 1980-02-25 1980-02-25 Flaw inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS56118646A (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103647A (ja) * 1981-12-16 1983-06-20 Nok Corp 表面欠陥検査方法
JPS5944643A (ja) * 1982-09-08 1984-03-13 Nok Corp 表面欠陥検査方法
JPS6211133A (ja) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS62124448A (ja) * 1985-11-26 1987-06-05 Hitachi Electronics Eng Co Ltd 表面検査装置
CZ306088B6 (cs) * 2004-07-07 2016-08-03 ĂšSTAV MERANIA SAV Způsob vyhledávání povrchových defektů, zejména ložiskových kroužků, a zařízení pro provádění tohoto způsobu

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5506243B2 (ja) * 2009-05-25 2014-05-28 株式会社日立製作所 欠陥検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517443A (en) * 1978-07-26 1980-02-06 Hitachi Electronics Eng Co Ltd Detector for surface deficiency of optical type

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517443A (en) * 1978-07-26 1980-02-06 Hitachi Electronics Eng Co Ltd Detector for surface deficiency of optical type

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103647A (ja) * 1981-12-16 1983-06-20 Nok Corp 表面欠陥検査方法
JPS5944643A (ja) * 1982-09-08 1984-03-13 Nok Corp 表面欠陥検査方法
JPS6211133A (ja) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS62124448A (ja) * 1985-11-26 1987-06-05 Hitachi Electronics Eng Co Ltd 表面検査装置
CZ306088B6 (cs) * 2004-07-07 2016-08-03 ĂšSTAV MERANIA SAV Způsob vyhledávání povrchových defektů, zejména ložiskových kroužků, a zařízení pro provádění tohoto způsobu

Also Published As

Publication number Publication date
JPH0228815B2 (en, 2012) 1990-06-26

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