JPS5517443A - Detector for surface deficiency of optical type - Google Patents

Detector for surface deficiency of optical type

Info

Publication number
JPS5517443A
JPS5517443A JP9032878A JP9032878A JPS5517443A JP S5517443 A JPS5517443 A JP S5517443A JP 9032878 A JP9032878 A JP 9032878A JP 9032878 A JP9032878 A JP 9032878A JP S5517443 A JPS5517443 A JP S5517443A
Authority
JP
Japan
Prior art keywords
detector
laser
lens
holder
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9032878A
Other languages
Japanese (ja)
Inventor
Hiroshi Nakajima
Masakatsu Ogami
Motoo Hourai
Nobuyoshi Tsuda
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP9032878A priority Critical patent/JPS5517443A/en
Publication of JPS5517443A publication Critical patent/JPS5517443A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Abstract

PURPOSE:To increase the detection efficiency, to make easy for the adjustment of optical system and to establish the automatic inspection system for the production line, by constituting the detector that the scattered light due to surface deficiency of silicon wafers and the like is fed to the photo detector via the radial fibers. CONSTITUTION:The detector is constituted with the lens 22 collecting the beam from the laser oscillation tube 4 and the fiber group 3 radially located with the direction to the position of the laser spot and the photo detection section providing the photo detector 3 on another end of the fiber group 3 is provided. Further, the laser tube 4 is supported orthogonal to the surface of the inspected object 1 with the holder 5, and the fiber 3 is inserted to the fixed fixture 9 having a plurality of insertion holes radially extended by taking the spot position as a center at the lower end of the holder 5. Further, the lens 22 is mounted between the lower end of the laser tube 4 and the fixture 9 so that the position can freely be adjusted up and down.
JP9032878A 1978-07-26 1978-07-26 Detector for surface deficiency of optical type Pending JPS5517443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9032878A JPS5517443A (en) 1978-07-26 1978-07-26 Detector for surface deficiency of optical type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9032878A JPS5517443A (en) 1978-07-26 1978-07-26 Detector for surface deficiency of optical type

Publications (1)

Publication Number Publication Date
JPS5517443A true JPS5517443A (en) 1980-02-06

Family

ID=13995449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9032878A Pending JPS5517443A (en) 1978-07-26 1978-07-26 Detector for surface deficiency of optical type

Country Status (1)

Country Link
JP (1) JPS5517443A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus
JPS56119450A (en) * 1980-02-25 1981-09-19 Ryozo Fujiwara Solar preheater for hot water supply
JPS5757338U (en) * 1980-09-21 1982-04-03
US6952491B2 (en) 1990-11-16 2005-10-04 Applied Materials, Inc. Optical inspection apparatus for substrate defect detection
CN105300325A (en) * 2015-11-11 2016-02-03 海信集团有限公司 Flatness detection method for fluorescent wheel in laser light source and device thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3278739A (en) * 1964-01-02 1966-10-11 Bausch & Lomb Illuminator
JPS5129160A (en) * 1974-09-05 1976-03-12 Nippon Steel Corp FUKISOKUHYOMENKEIJONOTOKEITEKISEISHITSU NO SOKUTEIHOHO

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3278739A (en) * 1964-01-02 1966-10-11 Bausch & Lomb Illuminator
JPS5129160A (en) * 1974-09-05 1976-03-12 Nippon Steel Corp FUKISOKUHYOMENKEIJONOTOKEITEKISEISHITSU NO SOKUTEIHOHO

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus
JPS56119450A (en) * 1980-02-25 1981-09-19 Ryozo Fujiwara Solar preheater for hot water supply
JPH0228815B2 (en) * 1980-02-25 1990-06-26 Hitachi Ltd
JPS5757338U (en) * 1980-09-21 1982-04-03
US6952491B2 (en) 1990-11-16 2005-10-04 Applied Materials, Inc. Optical inspection apparatus for substrate defect detection
CN105300325A (en) * 2015-11-11 2016-02-03 海信集团有限公司 Flatness detection method for fluorescent wheel in laser light source and device thereof
CN105300325B (en) * 2015-11-11 2018-05-29 海信集团有限公司 The measurement method of planeness and device of fluorescent wheel in a kind of laser light source
US10132751B2 (en) 2015-11-11 2018-11-20 Hisense Co., Ltd. Method and device for detecting flatness of a fluorescent wheel in a laser light source

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