JPS56118375A - Semiconductor displacement convertor - Google Patents

Semiconductor displacement convertor

Info

Publication number
JPS56118375A
JPS56118375A JP2045380A JP2045380A JPS56118375A JP S56118375 A JPS56118375 A JP S56118375A JP 2045380 A JP2045380 A JP 2045380A JP 2045380 A JP2045380 A JP 2045380A JP S56118375 A JPS56118375 A JP S56118375A
Authority
JP
Japan
Prior art keywords
cantilever
detecting body
strain detecting
metallic
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2045380A
Other languages
English (en)
Inventor
Michitaka Shimazoe
Ryozo Akaha
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2045380A priority Critical patent/JPS56118375A/ja
Publication of JPS56118375A publication Critical patent/JPS56118375A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
JP2045380A 1980-02-22 1980-02-22 Semiconductor displacement convertor Pending JPS56118375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2045380A JPS56118375A (en) 1980-02-22 1980-02-22 Semiconductor displacement convertor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2045380A JPS56118375A (en) 1980-02-22 1980-02-22 Semiconductor displacement convertor

Publications (1)

Publication Number Publication Date
JPS56118375A true JPS56118375A (en) 1981-09-17

Family

ID=12027483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2045380A Pending JPS56118375A (en) 1980-02-22 1980-02-22 Semiconductor displacement convertor

Country Status (1)

Country Link
JP (1) JPS56118375A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232375A (ja) * 1987-03-20 1988-09-28 Derufuai:Kk 応力変換器
WO2013160989A1 (ja) * 2012-04-23 2013-10-31 株式会社日立製作所 ひずみセンサチップ実装構造体、ひずみセンサチップおよびひずみセンサチップ実装構造体の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232375A (ja) * 1987-03-20 1988-09-28 Derufuai:Kk 応力変換器
WO2013160989A1 (ja) * 2012-04-23 2013-10-31 株式会社日立製作所 ひずみセンサチップ実装構造体、ひずみセンサチップおよびひずみセンサチップ実装構造体の製造方法
JPWO2013160989A1 (ja) * 2012-04-23 2015-12-21 株式会社日立製作所 ひずみセンサチップ実装構造体、ひずみセンサチップおよびひずみセンサチップ実装構造体の製造方法
US9709377B2 (en) 2012-04-23 2017-07-18 Hitachi, Ltd. Strain sensor chip mounting structure, strain sensor chip and method of manufacturing a strain sensor chip mounting structure

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